Electrical characterization of Si doped AlN films synthesized by pulsed laser deposition
2015 ◽
Vol 70
(1)
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pp. 10102
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2014 ◽
Vol 613
◽
pp. 395-400
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2011 ◽
Vol 11
(5)
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pp. S79-S81
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2013 ◽
Vol 860-863
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pp. 807-811
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