Space and time resolved electric field vector distribution in
radiofrequency discharges between unequal area electrodes
Keyword(s):
2002 ◽
Vol 9
(1)
◽
pp. 56-60
◽
1999 ◽
Vol 38
(Part 1, No. 10)
◽
pp. 6170-6171
◽
2003 ◽
Vol 123
(6)
◽
pp. 600-601
◽
Keyword(s):
1999 ◽
Vol 119
(8-9)
◽
pp. 1097-1102
Keyword(s):
2001 ◽
Vol 121
(3)
◽
pp. 243-248
◽
2002 ◽
Vol 9
(6)
◽
pp. 972-974
◽
2002 ◽