GaN heteroepitaxy by remote plasma MOCVD : Real time monitoring by laser reflectance interferometry
2001 ◽
Vol 11
(PR3)
◽
pp. Pr3-1175-Pr3-1182
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 9
(1)
◽
pp. 133-140
2019 ◽
Vol 18
(7)
◽
pp. 1561-1574