Tracking Control of a Piezo Positioning Stage with Scalar Sign Function and Digital Redesign Technique

2010 ◽  
Author(s):  
Mithun Singla ◽  
Jian Wu ◽  
Gangbing Song ◽  
Leang San Shieh
2013 ◽  
Vol 284-287 ◽  
pp. 2325-2329
Author(s):  
Jing Chung Shen ◽  
Chau Chia Yan

This work concerns the development of a sliding-mode tracking controller for a precision positioning stage. This stage is supported by cross roller guides, therefore, one of the main disturbances during dynamic motion is the friction force. In order to overcome the effect of friction, an integral sliding-mode controller with friction disturbance estimation scheme is designed to control the motion of the stage. Comparing with conventional PID controllers, the experimental results show that with this controller the tracking errors can be reduced significantly.


Author(s):  
Atsushi SAKAMOTO ◽  
Yuichi IKEDA ◽  
Isao YAMAGUCHI ◽  
Takashi KIDA

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