Tracking Control of a Piezo Positioning Stage with Scalar Sign Function and Digital Redesign Technique
2012 ◽
Vol 64
(5)
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pp. 766-787
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2021 ◽
Vol 1113
(1)
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pp. 012003
2021 ◽
Vol 31
(10)
◽
pp. 105006
Keyword(s):
2013 ◽
Vol 284-287
◽
pp. 2325-2329
Keyword(s):
2009 ◽
Vol 129
(9)
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pp. 930-937
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2017 ◽
Vol 10
(1)
◽
pp. 49
2016 ◽
Vol 15
(0)
◽
pp. 133-140