Characterization of epitaxial and oxidation‐induced stacking faults in silicon: The influence of transition‐metal contamination
2010 ◽
Vol 13
(1)
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pp. 36-42
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2012 ◽
Vol 53
(4)
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pp. 665-675
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Keyword(s):
2019 ◽
Vol 58
(4)
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pp. 2354-2362
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2016 ◽
Vol 46
(22)
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pp. 1820-1832
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