Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

E. Neyts; M. Yan; A. Bogaerts; R. Gijbels

doi:10.1063/1.1563820

Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

Journal of Applied Physics ◽

10.1063/1.1563820 ◽

2003 ◽

Vol 93 (9) ◽

pp. 5025-5033 ◽

Cited By ~ 16

Author(s):

E. Neyts ◽

M. Yan ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo ◽

Monte Carlo Simulations ◽

Radio Frequency ◽

Low Pressure ◽

Capacitively Coupled ◽

Particle In Cell ◽

Radio Frequency Discharge

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Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH[sub 4]/H[sub 2] capacitively coupled radio frequency discharge

Journal of Applied Physics ◽

10.1063/1.1461895 ◽

2002 ◽

Vol 91 (10) ◽

pp. 6296 ◽

Cited By ~ 30

Author(s):

Vladimir Ivanov ◽

Olga Proshina ◽

Tatyana Rakhimova ◽

Alexander Rakhimov ◽

Dieter Herrebout ◽

...

Keyword(s):

Monte Carlo ◽

Radio Frequency ◽

Fluid Model ◽

Monte Carlo Model ◽

Capacitively Coupled ◽

One Dimensional ◽

Particle In Cell ◽

Radio Frequency Discharge

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Simulation of Low-Pressure Capacitively Coupled Plasmas Combining a Parallelized Particle-in-Cell Simulation and Direct Simulation of Monte Carlo

IEEE Transactions on Plasma Science ◽

10.1109/tps.2014.2368145 ◽

2014 ◽

Vol 42 (12) ◽

pp. 3819-3824 ◽

Cited By ~ 4

Author(s):

Jin Seok Kim ◽

Min Young Hur ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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Fast modeling of the low‐pressure capacitively coupled radio‐frequency discharge based on the nonlocal approach

Applied Physics Letters ◽

10.1063/1.117518 ◽

1996 ◽

Vol 69 (16) ◽

pp. 2341-2343 ◽

Cited By ~ 6

Author(s):

S. V. Berezhnoi ◽

I. D. Kaganovich ◽

L. D. Tsendin ◽

V. A. Schweigert

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Capacitively Coupled ◽

Nonlocal Approach ◽

Radio Frequency Discharge

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Simulation of low-pressure capacitively coupled plasmas using a parallelized particle-in-cell simulation and a direct simulation of Monte Carlo for neutrals

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633183 ◽

2013 ◽

Author(s):

Jin Seok Kim ◽

In Cheol Song ◽

Ho-Jun Lee ◽

Hae June Lee

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Direct Simulation ◽

Capacitively Coupled ◽

Particle In Cell ◽

Cell Simulation ◽

Coupled Plasmas

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Particle-in-cell/Monte Carlo simulation of a capacitively coupled radio frequency Ar/CF4 discharge: Effect of gas composition

Journal of Applied Physics ◽

10.1063/1.1542920 ◽

2003 ◽

Vol 93 (5) ◽

pp. 2369-2379 ◽

Cited By ~ 56

Author(s):

V. Georgieva ◽

A. Bogaerts ◽

R. Gijbels

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Radio Frequency ◽

Gas Composition ◽

Capacitively Coupled ◽

Particle In Cell

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Comparison of measurements and particle-in-cell simulations of ion energy distribution functions in a capacitively coupled radio-frequency discharge

Physics of Plasmas ◽

10.1063/1.2795634 ◽

2007 ◽

Vol 14 (10) ◽

pp. 103510 ◽

Cited By ~ 36

Author(s):

D. O’Connell ◽

R. Zorat ◽

A. R. Ellingboe ◽

M. M. Turner

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Distribution Functions ◽

Ion Energy ◽

Capacitively Coupled ◽

Ion Energy Distribution ◽

Particle In Cell ◽

Energy Distribution Functions ◽

Radio Frequency Discharge

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Efficient GPU implementation of the Particle-in-Cell/Monte-Carlo collisions method for 1D simulation of low-pressure capacitively coupled plasmas

Computer Physics Communications ◽

10.1016/j.cpc.2021.107913 ◽

2021 ◽

pp. 107913

Author(s):

Zoltan Juhasz ◽

Ján Ďurian ◽

Aranka Derzsi ◽

Štefan Matejčík ◽

Zoltán Donkó ◽

...

Keyword(s):

Monte Carlo ◽

Low Pressure ◽

Capacitively Coupled ◽

Particle In Cell ◽

Coupled Plasmas ◽

Gpu Implementation

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Field probe for low-pressure capacitively coupled radio-frequency discharge plasmas

Measurement Science and Technology ◽

10.1088/0957-0233/14/1/316 ◽

2002 ◽

Vol 14 (1) ◽

pp. 107-113 ◽

Cited By ~ 1

Author(s):

Anthony Dyson ◽

John E Allen

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Capacitively Coupled ◽

Discharge Plasmas ◽

Radio Frequency Discharge

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Power dissipated in low‐pressure radio‐frequency discharge plasmas

Journal of Applied Physics ◽

10.1063/1.335395 ◽

1985 ◽

Vol 57 (1) ◽

pp. 53-58 ◽

Cited By ~ 103

Author(s):

O. A. Popov ◽

V. A. Godyak

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Discharge Plasmas ◽

Radio Frequency Discharge

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Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/40/22/022 ◽

2007 ◽

Vol 40 (22) ◽

pp. 7008-7018 ◽

Cited By ~ 92

Author(s):

J Schulze ◽

T Gans ◽

D O'Connell ◽

U Czarnetzki ◽

A R Ellingboe ◽

...

Keyword(s):

Radio Frequency ◽

Dual Frequency ◽

Plasma Parameters ◽

Capacitively Coupled ◽

Radio Frequency Discharge

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