Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

2003 ◽  
Vol 93 (9) ◽  
pp. 5025-5033 ◽  
Author(s):  
E. Neyts ◽  
M. Yan ◽  
A. Bogaerts ◽  
R. Gijbels
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Simulations ◽  
Radio Frequency ◽  
Low Pressure ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Radio Frequency Discharge

Fast modeling of the low‐pressure capacitively coupled radio‐frequency discharge based on the nonlocal approach

1996 ◽  
Vol 69 (16) ◽  
pp. 2341-2343 ◽  
Author(s):  
S. V. Berezhnoi ◽  
I. D. Kaganovich ◽  
L. D. Tsendin ◽  
V. A. Schweigert
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Capacitively Coupled ◽  
Nonlocal Approach ◽  
Radio Frequency Discharge

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge
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