Comparison of a one-dimensional particle-in-cell–Monte Carlo model and a one-dimensional fluid model for a CH[sub 4]/H[sub 2] capacitively coupled radio frequency discharge

2002 ◽  
Vol 91 (10) ◽  
pp. 6296 ◽  
Author(s):  
Vladimir Ivanov ◽  
Olga Proshina ◽  
Tatyana Rakhimova ◽  
Alexander Rakhimov ◽  
Dieter Herrebout ◽  
...  
Keyword(s):  
Monte Carlo ◽  
Radio Frequency ◽  
Fluid Model ◽  
Monte Carlo Model ◽  
Capacitively Coupled ◽  
One Dimensional ◽  
Particle In Cell ◽  
Radio Frequency Discharge

scholarly journals Simulations of electrical asymmetry effect on N2-H2 capacitively coupled plasma by particle-in-cell/Monte Carlo model

2014 ◽  
Vol 63 (18) ◽  
pp. 185205
Author(s):  
Hao Ying-Ying ◽  
Meng Xiu-Lan ◽  
Yao Fu-Bao ◽  
Zhao Guo-Ming ◽  
Wang Jing ◽  
...  
Keyword(s):  
Monte Carlo ◽  
Monte Carlo Model ◽  
Asymmetry Effect ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Capacitively Coupled Plasma

Modeling of a capacitively coupled radio-frequency methane plasma: Comparison between a one-dimensional and a two-dimensional fluid model

2002 ◽  
Vol 92 (5) ◽  
pp. 2290-2295 ◽  
Author(s):  
D. Herrebout ◽  
A. Bogaerts ◽  
M. Yan ◽  
R. Gijbels ◽  
W. Goedheer ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Fluid Model ◽  
Two Dimensional ◽  
Capacitively Coupled ◽  
One Dimensional

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

Hydro-carbon material design in a capacitively coupled radio-frequency discharge

2017 ◽  
Vol 15 (3) ◽  
pp. 1700152 ◽  
Author(s):  
Slobodan Mitic ◽  
Stéphane Coussan ◽  
Céline Martin ◽  
Lénaïc Couëdel
Keyword(s):  
Radio Frequency ◽  
Carbon Material ◽  
Material Design ◽  
Capacitively Coupled ◽  
Hydro Carbon ◽  
Radio Frequency Discharge
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