Extremely low‐loss glass thin‐film optical waveguides utilizing surface coating and laser annealing

Journal of Applied Physics ◽

10.1063/1.329854 ◽

1981 ◽

Vol 52 (6) ◽

pp. 3873-3875 ◽

Author(s):

Subhadra Dutta ◽

Howard E. Jackson ◽

J. T. Boyd

Keyword(s):

Thin Film ◽

Surface Coating ◽

Optical Waveguides ◽

Laser Annealing ◽

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Use of laser annealing and surface coating to fabricate very low-loss thin-film glass waveguides

10.1364/ofc.1981.wb5 ◽

1981 ◽

Author(s):

Subhadra Dutta ◽

Howard E. Jackson ◽

J. T. Boyd

Keyword(s):

Thin Film ◽

Surface Coating ◽

Laser Annealing ◽

Low Loss ◽

Glass Waveguides

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Fabrication of low loss polyimide optical waveguides using thin-film multichip module process technology

1994 Proceedings. 44th Electronic Components and Technology Conference ◽

10.1109/ectc.1994.367609 ◽

2002 ◽

Author(s):

A.J. Beuhler ◽

D.A. Wargowski ◽

K.D. Singer ◽

T. Kowalczyk

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Multichip Module ◽

Process Technology ◽

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Low-loss polymer thin-film optical waveguides

10.1117/12.25836 ◽

1991 ◽

Author(s):

Peerouz M. Amleshi ◽

David L. Naylor

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Low Loss ◽

Polymer Thin Film

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Corning 7059, Silicon Oxynitride, and Silicon Dioxide Thin-Film Integrated Optical Waveguides: In Search of Low Loss, Nonfluorescent, Reusable Glass Waveguides

Applied Spectroscopy ◽

10.1366/0003702924123818 ◽

1992 ◽

Vol 46 (9) ◽

pp. 1437-1441 ◽

Author(s):

D. S. Walker ◽

W. M. Reichert ◽

C. J. Berry

Keyword(s):

Thin Film ◽

Silicon Dioxide ◽

Optical Waveguides ◽

Silicon Oxynitride ◽

Low Loss ◽

Glass Waveguides ◽

Integrated Optical ◽

Integrated Optical Waveguides

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Fabrication of low loss polyimide optical waveguides using thin-film multichip module process technology

IEEE Transactions on Components Packaging and Manufacturing Technology Part B ◽

10.1109/96.386246 ◽

1995 ◽

Vol 18 (2) ◽

pp. 232-234 ◽

Author(s):

A.J. Beuhler ◽

D.A. Wargowski ◽

K.D. Singer ◽

T. Kowalczyk

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Multichip Module ◽

Process Technology ◽

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Use Of Laser Annealing To Achieve Low Loss In Corning 7059 Glass, ZnO, Si3N4, Nb205, and Ta205 Optical Thin-Film Waveguides

Optical Engineering ◽

10.1117/12.7973058 ◽

1983 ◽

Vol 22 (1) ◽

Author(s):

S. Dutta ◽

H. E. Jackson ◽

J. T. Boyd

Keyword(s):

Thin Film ◽

Laser Annealing ◽

Low Loss ◽

Optical Thin Film ◽

Thin Film Waveguides

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CO<inf>2</inf>laser annealing of Si<inf>3</inf>N<inf>4</inf>, Nb<inf>2</inf>O<inf>5</inf>, and Ta<inf>2</inf>O<inf>5</inf>thin-film optical waveguides to achieve scattering loss reduction

IEEE Journal of Quantum Electronics ◽

10.1109/jqe.1982.1071579 ◽

1982 ◽

Vol 18 (4) ◽

pp. 800-806 ◽

Author(s):

S. Dutta ◽

H. Jackson ◽

J. Boyd ◽

R. Davis ◽

F. Hickernell

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Laser Annealing ◽

Loss Reduction ◽

Scattering Loss

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Use Of Laser Annealing To Achieve Low Loss In Corning 7059 Glass, ZnO, Si3N4, Nb2O5, And Ta2O5 Optical Thin Film Waveguides

10.1117/12.933213 ◽

1982 ◽

Author(s):

S. Dutta ◽

H. E. Jackson ◽

J. T. Boyd

Keyword(s):

Thin Film ◽

Laser Annealing ◽

Low Loss ◽

Optical Thin Film ◽

Thin Film Waveguides

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CO/sub 2/ Laser Annealing of Si/sub 3/N/sub 4/, Nb/sub 2/O/sub 5/, and Ta/sub 2/O/sub 5/ Thin-Film Optical Waveguides to Achieve Scattering Loss Reduction

IEEE Transactions on Microwave Theory and Techniques ◽

10.1109/tmtt.1982.1131111 ◽

1982 ◽

Vol 30 (4) ◽

pp. 646-652

Author(s):

S. Dutta ◽

H.E. Jackson ◽

J.T. Boyd ◽

R.L. Davis ◽

F.S. Hickernell

Keyword(s):

Thin Film ◽

Optical Waveguides ◽

Laser Annealing ◽

Loss Reduction ◽

Scattering Loss

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Laser annealing of metal oxide thin film transistor

Chinese Journal of Liquid Crystals and Displays ◽

10.37188/yjyxs20203512.1211 ◽

2020 ◽

Vol 35 (12) ◽

pp. 1211-1221

Author(s):

Hong-long NING ◽

◽

Yu-xi DENG ◽

Jian-lang HUANG ◽

Zi-long LUO ◽

...

Keyword(s):

Thin Film ◽

Metal Oxide ◽

Laser Annealing ◽

Thin Film Transistor ◽

Oxide Thin Film ◽

Metal Oxide Thin Film

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