Monte Carlo simulation of ion transport through rf glow‐discharge sheaths

1988 ◽  
Vol 63 (7) ◽  
pp. 2241-2251 ◽  
Author(s):  
Brian E. Thompson ◽  
Herbert H. Sawin ◽  
Donald A. Fisher
2009 ◽  
Author(s):  
P. Diomede ◽  
S. Longo ◽  
M. Capitelli ◽  
Elizabeth Surrey ◽  
Alain Simonin

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