Monte Carlo simulation of ion transport through rf glow‐discharge sheaths
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2009 ◽
1997 ◽
Vol 126
(1-4)
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pp. 290-293
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1983 ◽
Vol 16
(9)
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pp. 1705-1714
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1995 ◽
Vol 50
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pp. 179-196
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2001 ◽
Vol 34
(23)
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pp. 3349-3355
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1999 ◽
Vol 68
(4)
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pp. 1208-1215
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1994 ◽
Vol 33
(Part 1, No. 4B)
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pp. 2212-2222
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