A transmission electron microscope investigation of the dose dependence of the microstructure of silicon‐on‐insulator structures formed by nitrogen implantation of silicon
2013 ◽
pp. 55-66
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1997 ◽
Vol 32
(2)
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pp. 309-316
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1984 ◽
Vol 10
(3-4)
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pp. 349-370
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1998 ◽
Vol 55
(2)
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pp. 160-163
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1991 ◽
Vol 4
(1)
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pp. 21-26
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