Inelastic electron tunneling spectroscopy study of ultrathin Al2O3–TiO2 dielectric stack on Si

2010 ◽  
Vol 97 (20) ◽  
pp. 202905 ◽  
Author(s):  
Zuoguang Liu ◽  
Sharon Cui ◽  
Lior Kornblum ◽  
Moshe Eizenberg ◽  
Ming-Feng Chang ◽  
...  
Keyword(s):  
Electron Tunneling ◽  
Tunneling Spectroscopy ◽  
Inelastic Electron ◽  
Spectroscopy Study ◽  
Inelastic Electron Tunneling Spectroscopy ◽  
Inelastic Electron Tunneling ◽  
Electron Tunneling Spectroscopy

Inelastic Electron Tunneling Spectroscopy Study of Thin Gate Dielectrics

2010 ◽  
Vol 22 (26-27) ◽  
pp. 2962-2968 ◽  
Author(s):  
James W. Reiner ◽  
Sharon Cui ◽  
Zuoguang Liu ◽  
Miaomiao Wang ◽  
Charles H. Ahn ◽  
...  
Keyword(s):  
Electron Tunneling ◽  
Gate Dielectrics ◽  
Tunneling Spectroscopy ◽  
Inelastic Electron ◽  
Spectroscopy Study ◽  
Inelastic Electron Tunneling Spectroscopy ◽  
Inelastic Electron Tunneling ◽  
Electron Tunneling Spectroscopy
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