Structural and optical properties of hydrogenated amorphous silicon carbide deposited by glow discharge from C3H8‐SiH4‐H2mixture

1992 ◽  
Vol 72 (11) ◽  
pp. 5246-5252 ◽  
Author(s):  
Jang‐Ho Park ◽  
Hyuk‐Sang Kwon ◽  
Jai‐Young Lee
Keyword(s):  
Silicon Carbide ◽  
Optical Properties ◽  
Glow Discharge ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Structural And Optical Properties ◽  
Amorphous Silicon Carbide ◽  
Hydrogenated Amorphous

RF-PECVD deposition and optical properties of hydrogenated amorphous silicon carbide thin films

2014 ◽  
Vol 40 (7) ◽  
pp. 9791-9797 ◽  
Author(s):  
Enlong Chen ◽  
Guoping Du ◽  
Yu Zhang ◽  
Xiaomei Qin ◽  
Hongmei Lai ◽  
...  
Keyword(s):  
Thin Films ◽  
Silicon Carbide ◽  
Optical Properties ◽  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Amorphous Silicon Carbide ◽  
Hydrogenated Amorphous
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