Properties of AlN films grown at 350 K by gas‐phase excimer laser photolysis
Keyword(s):
1991 ◽
Vol 95
(24)
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pp. 9841-9852
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Keyword(s):
1986 ◽
Vol 85
(4)
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pp. 1977-1986
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Keyword(s):
1986 ◽
Vol 108
(16)
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pp. 4721-4728
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Keyword(s):
Keyword(s):
1990 ◽
Vol 94
(6)
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pp. 2404-2413
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1988 ◽
Vol 92
(13)
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pp. 3863-3869
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