Real time spectroellipsometry for optimization of diamond film growth by microwave plasma‐enhanced chemical vapor deposition from CO/H2mixtures

1996 ◽  
Vol 80 (11) ◽  
pp. 6489-6495 ◽  
Author(s):  
Joungchel Lee ◽  
Byungyou Hong ◽  
R. Messier ◽  
R. W. Collins
Keyword(s):  
Chemical Vapor Deposition ◽  
Real Time ◽  
Diamond Film ◽  
Vapor Deposition ◽  
Film Growth ◽  
Microwave Plasma ◽  
Chemical Vapor ◽  
Diamond Film Growth

DYNAMIC SCALING PHENOMENA IN DIAMOND FILM GROWTH

2001 ◽  
Vol 08 (03n04) ◽  
pp. 347-351 ◽  
Author(s):  
M. CATTANI ◽  
M. C. SALVADORI
Keyword(s):  
Chemical Vapor Deposition ◽  
Differential Equations ◽  
Diamond Film ◽  
Vapor Deposition ◽  
Film Growth ◽  
Diamond Films ◽  
Growth Dynamics ◽  
Chemical Vapor ◽  
Dynamic Scaling ◽  
Diamond Film Growth

In this paper we investigate how the growth dynamics of diamond films, synthesized by plasma-enhanced chemical vapor deposition, can be explained within the framework of the Edwards–Wilkinson and Kardar–Parisi–Zhang stochastic differential equations.

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