Dose effects on amorphous silicon sputtering by argon ions: A molecular dynamics simulation
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1995 ◽
Vol 102
(1-4)
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pp. 301-304
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2017 ◽
Vol 66
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pp. 950-956
2011 ◽
Vol 81
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pp. 283-290
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Vol 34
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1994 ◽
Vol 114
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pp. 639-644
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