Dose effects on amorphous silicon sputtering by argon ions: A molecular dynamics simulation

1997 ◽  
Vol 81 (3) ◽  
pp. 1488-1494 ◽  
Author(s):  
Luis A. Marqués ◽  
José E. Rubio ◽  
Martı́n Jaraı́z ◽  
Luis A. Bailón ◽  
Juan J. Barbolla
1991 ◽  
Vol 43 (8) ◽  
pp. 6573-6580 ◽  
Author(s):  
Young Hee Lee ◽  
R. Biswas ◽  
C. M. Soukoulis ◽  
C. Z. Wang ◽  
C. T. Chan ◽  
...  

1999 ◽  
Vol 59 (4) ◽  
pp. 2713-2721 ◽  
Author(s):  
Eunja Kim ◽  
Young Hee Lee ◽  
Changfeng Chen ◽  
Tao Pang

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