High-power laser plasma sources: Soft x-ray projection lithography and other applications

1993 ◽  
Author(s):  
G. D. Kubiak ◽  
K. W. Berger ◽  
S. J. Haney ◽  
D. A. Tichenor ◽  
R. H. Stulen ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Coded aperture x-ray imaging of high power laser-plasma interactions on the Vulcan Laser System

2018 ◽  
Author(s):  
Robert I. Heathcote ◽  
Nicola Booth ◽  
Robert J. Clarke ◽  
Asha Anderson-Asubonteng ◽  
Matthew P. Selwood ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
Laser System ◽  
Coded Aperture ◽  
High Power Laser ◽  
Power Laser ◽  
Plasma Interactions ◽  
X Ray ◽  
Laser Plasma Interactions ◽  
X Ray Imaging

High-power laser-plasma x-ray source for lithography

2002 ◽  
Author(s):  
Celestino J. Gaeta ◽  
Harry Rieger ◽  
I. C. Edmond Turcu ◽  
Richard A. Forber ◽  
Kelly L. Cassidy ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray

Compact high-power laser-plasma x-ray source for lithography

2001 ◽  
Author(s):  
Celestino J. Gaeta ◽  
Harry Rieger ◽  
I. C. Edmond Turcu ◽  
Richard A. Forber ◽  
S. M. Campeau ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray

Microfocus soft x-ray source generated by a compact high-power laser plasma

2000 ◽  
Author(s):  
I. C. Edmond Turcu ◽  
Harry Rieger ◽  
Yuli Vladimirsky ◽  
Robert K. Grygier ◽  
Michael F. Powers ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray

Laser plasma sources for soft X-ray projection lithography

1994 ◽  
Vol 4 (9) ◽  
pp. 1669-1677 ◽  
Author(s):  
F. Bijkerk ◽  
L. Shmaenok ◽  
A. van Honk ◽  
R. Bastiaensen ◽  
Yu. Ya. Platonov ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

Application of laser plasma sources in soft x-ray projection lithography

1994 ◽  
Author(s):  
Daniel A. Tichenor ◽  
Glenn D. Kubiak ◽  
Michael E. Malinowski ◽  
Richard H. Stulen ◽  
Steven J. Haney ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection

X-ray Spectral Measurements of the JMAR High-Power Laser-plasma Source

2002 ◽  
Author(s):  
Robert R. Whitlock ◽  
Charles M. Dozier ◽  
Daniel A. Newman ◽  
I. C. Edmond Turcu ◽  
Celestino J. Gaeta ◽  
...  
Keyword(s):  
High Power ◽  
Laser Plasma ◽  
Plasma Source ◽  
Spectral Measurements ◽  
High Power Laser ◽  
Power Laser ◽  
X Ray

Laser plasma sources for soft x-ray projection lithography

1993 ◽  
Author(s):  
Martin C. Richardson ◽  
William T. Silfvast ◽  
Howard Bender III ◽  
Art Hanzo ◽  
Feng Jin ◽  
...  
Keyword(s):  
Laser Plasma ◽  
Plasma Sources ◽  
X Ray ◽  
Projection Lithography ◽  
Ray Projection
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