High-power laser-plasma x-ray source for lithography

Author(s):  
Celestino J. Gaeta ◽  
Harry Rieger ◽  
I. C. Edmond Turcu ◽  
Richard A. Forber ◽  
Kelly L. Cassidy ◽  
...  
Author(s):  
Robert I. Heathcote ◽  
Nicola Booth ◽  
Robert J. Clarke ◽  
Asha Anderson-Asubonteng ◽  
Matthew P. Selwood ◽  
...  

2001 ◽  
Author(s):  
Celestino J. Gaeta ◽  
Harry Rieger ◽  
I. C. Edmond Turcu ◽  
Richard A. Forber ◽  
S. M. Campeau ◽  
...  

2000 ◽  
Author(s):  
I. C. Edmond Turcu ◽  
Harry Rieger ◽  
Yuli Vladimirsky ◽  
Robert K. Grygier ◽  
Michael F. Powers ◽  
...  

2002 ◽  
Author(s):  
Robert R. Whitlock ◽  
Charles M. Dozier ◽  
Daniel A. Newman ◽  
I. C. Edmond Turcu ◽  
Celestino J. Gaeta ◽  
...  

1993 ◽  
Author(s):  
G. D. Kubiak ◽  
K. W. Berger ◽  
S. J. Haney ◽  
D. A. Tichenor ◽  
R. H. Stulen ◽  
...  

2017 ◽  
Vol 7 (7) ◽  
pp. 671 ◽  
Author(s):  
Toshiaki Inada ◽  
Takayuki Yamazaki ◽  
Tomohiro Yamaji ◽  
Yudai Seino ◽  
Xing Fan ◽  
...  

2021 ◽  
Vol 9 ◽  
Author(s):  
Yumi Kaneyasu ◽  
Keiji Nagai ◽  
Marilou Cadatal-Raduban ◽  
Daniil Golovin ◽  
Satoshi Shokita ◽  
...  

Abstract Resorcinol/formaldehyde (RF) foam resin is an attractive material as a low-density target in high-power laser–plasma experiments because of its fine network structure, transparency in the visible region, and low-Z element (hydrogen, carbon, and oxygen) composition. In this study, we developed disk-shaped RF foam and deuterated RF foam targets with 40–200 μm thickness and approximately 100 mg/cm3 density having a network structure from 100 nm to a few micrometers cell size. By deuteration, the polymerization rate was drastically slowed down owing to kinetic isotope effects. These targets were used in high-power laser experiments where a megaelectronvolt proton beam was successfully generated.


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