Self consistent radio-frequency wave propagation and peripheral direct current plasma biasing: Simplified three dimensional non-linear treatment in the “wide sheath” asymptotic regime
Keyword(s):
2014 ◽
Vol 185
(3)
◽
pp. 736-743
◽
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
1986 ◽
Vol 243
(2-3)
◽
pp. 263-270
◽
Keyword(s):