Effect of plasmonic lens distribution on flight characteristics in rotational near-field photolithography

2019 ◽  
Vol 126 (18) ◽  
pp. 183101
Author(s):  
Jiaxin Ji ◽  
Jiying Chen ◽  
Pengfei Xu ◽  
Jing Li ◽  
Yueqiang Hu ◽  
...  
Keyword(s):  
RSC Advances ◽  
2017 ◽  
Vol 7 (20) ◽  
pp. 12366-12373 ◽  
Author(s):  
Yunfei Luo ◽  
Ling Liu ◽  
Wei Zhang ◽  
Weijie Kong ◽  
Chengwei Zhao ◽  
...  

The methods for resolution enhancement and proximity correction of plasmonic lens lithography far beyond near field diffraction limit are investigated.


2010 ◽  
Author(s):  
Liang Pan ◽  
Yong-Shik Park ◽  
Yi Xiong ◽  
Erick Ulin-Avila ◽  
Li Zeng ◽  
...  
Keyword(s):  

Author(s):  
Liang Pan ◽  
Peter Park ◽  
Yi Xiong ◽  
Erick Ulin-Avila ◽  
Li Zeng ◽  
...  
Keyword(s):  

2008 ◽  
Vol 3 (12) ◽  
pp. 733-737 ◽  
Author(s):  
Werayut Srituravanich ◽  
Liang Pan ◽  
Yuan Wang ◽  
Cheng Sun ◽  
David B. Bogy ◽  
...  
Keyword(s):  

2017 ◽  
Author(s):  
Karen Sloyan ◽  
Henrik Melkonyan ◽  
Paulo Moreira ◽  
Marcus S. Dahlem

Plasmonics ◽  
2014 ◽  
Vol 10 (1) ◽  
pp. 51-56 ◽  
Author(s):  
Wei Zhang ◽  
Hao Wang ◽  
Changtao Wang ◽  
Na Yao ◽  
Zeyu Zhao ◽  
...  

Author(s):  
E. Betzig ◽  
A. Harootunian ◽  
M. Isaacson ◽  
A. Lewis

In general, conventional methods of optical imaging are limited in spatial resolution by either the wavelength of the radiation used or by the aberrations of the optical elements. This is true whether one uses a scanning probe or a fixed beam method. The reason for the wavelength limit of resolution is due to the far field methods of producing or detecting the radiation. If one resorts to restricting our probes to the near field optical region, then the possibility exists of obtaining spatial resolutions more than an order of magnitude smaller than the optical wavelength of the radiation used. In this paper, we will describe the principles underlying such "near field" imaging and present some preliminary results from a near field scanning optical microscope (NS0M) that uses visible radiation and is capable of resolutions comparable to an SEM. The advantage of such a technique is the possibility of completely nondestructive imaging in air at spatial resolutions of about 50nm.


2007 ◽  
Author(s):  
Stuart Gregson ◽  
John McCormick ◽  
Clive Parini

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