Modeling study on the enhancement of atmospheric pulse-modulated radio-frequency discharge assisted by pulsed voltage

2021 ◽  
Vol 28 (11) ◽  
pp. 113501
Author(s):  
Shu-Han Gao ◽  
Xiao-Long Wang ◽  
Yuan-Tao Zhang
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharge ◽  
Pulsed Voltage ◽  
Modeling Study

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

On the Ions in an Argon-Hexamethyldisiloxane Radio-Frequency-Discharge

1994 ◽  
pp. 335-341 ◽  
Author(s):  
Rüdiger Foest ◽  
Martin Schmidt ◽  
Mario Hannemann ◽  
Ralf Basner
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharge
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