RADIO FREQUENCY DISCHARGE PLASMA AND HELICON SOURCE FOR DIFFERENT APPLICATIONS
High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
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2014 ◽
Vol 18
(1-2)
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pp. 111-117
Keyword(s):
1998 ◽
Vol 87
(5)
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pp. 905-915
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Keyword(s):
Keyword(s):