On the Ions in an Argon-Hexamethyldisiloxane Radio-Frequency-Discharge

1994 ◽  
pp. 335-341 ◽  
Author(s):  
Rüdiger Foest ◽  
Martin Schmidt ◽  
Mario Hannemann ◽  
Ralf Basner
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharge

Silane thermometry in radio‐frequency discharge plasma by coherent anti‐Stokes Raman spectroscopy

1986 ◽  
Vol 59 (6) ◽  
pp. 1872-1874 ◽  
Author(s):  
Nobuhiro Hata ◽  
Akihisa Matsuda ◽  
Kazunobu Tanaka
Keyword(s):  
Raman Spectroscopy ◽  
Radio Frequency ◽  
Discharge Plasma ◽  
Anti Stokes ◽  
Radio Frequency Discharge

Power dissipated in low‐pressure radio‐frequency discharge plasmas

1985 ◽  
Vol 57 (1) ◽  
pp. 53-58 ◽  
Author(s):  
O. A. Popov ◽  
V. A. Godyak
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Discharge Plasmas ◽  
Radio Frequency Discharge

Probe measurements of the space potential in a radio frequency discharge

1990 ◽  
Vol 68 (7) ◽  
pp. 3157-3162 ◽  
Author(s):  
V. A. Godyak ◽  
R. B. Piejak
Keyword(s):  
Radio Frequency ◽  
Space Potential ◽  
Radio Frequency Discharge ◽  
Probe Measurements

scholarly journals Space and phase resolved plasma parameters in an industrial dual-frequency capacitively coupled radio-frequency discharge

2007 ◽  
Vol 40 (22) ◽  
pp. 7008-7018 ◽  
Author(s):  
J Schulze ◽  
T Gans ◽  
D O'Connell ◽  
U Czarnetzki ◽  
A R Ellingboe ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Dual Frequency ◽  
Plasma Parameters ◽  
Capacitively Coupled ◽  
Radio Frequency Discharge

scholarly journals Gas Temperature Analysis of Laser Gain Medium in a Slab-type Radio-frequency-discharge-excited CO2 Laser

2008 ◽  
Vol 36 (APLS) ◽  
pp. 1261-1264
Author(s):  
Takahiro ABE ◽  
Takashi YASUDA ◽  
Masaaki TANIZAKI ◽  
Shigeru YAMAGUCHI ◽  
Kenzo NANRI ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Co2 Laser ◽  
Gain Medium ◽  
Gas Temperature ◽  
Temperature Analysis ◽  
Laser Gain ◽  
Radio Frequency Discharge
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