High-brightness ultraviolet radiation source based on a cumulative plasmadynamic discharge

1982 ◽  
Vol 12 (7) ◽  
pp. 910-914
Author(s):  
A S Kamrukov ◽  
N P Kozlov ◽  
S G Kuznetsov ◽  
Yu S Protasov
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
High Brightness

High-brightness pulse-periodic ultraviolet radiation source utilizing a linearly stabilized surface discharge

1986 ◽  
Vol 16 (1) ◽  
pp. 44-50 ◽  
Author(s):  
S N Bugrimov ◽  
A S Kamrukov ◽  
G N Kashnikov ◽  
N P Kozlov ◽  
P A Ovchinnikov ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Surface Discharge ◽  
High Brightness

The effect of water vapor on the characteristics of a pulsed-periodic ultraviolet radiation source

2001 ◽  
Vol 27 (12) ◽  
pp. 1024-1025
Author(s):  
A. K. Shuaibov ◽  
A. I. Dashchenko ◽  
I. V. Shevera
Keyword(s):  
Water Vapor ◽  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Effect Of Water

High-power 1 μsec ultraviolet radiation source for pumping of gas lasers

1976 ◽  
Vol 6 (8) ◽  
pp. 994-996 ◽  
Author(s):  
A S Bashkin ◽  
P G Grigor'ev ◽  
A N Oraevskiĭ ◽  
A B Skvortsov
Keyword(s):  
Ultraviolet Radiation ◽  
High Power ◽  
Radiation Source ◽  
Gas Lasers

Development of Xe-filled capillary discharge extreme-ultraviolet radiation source for semiconductor lithography

2003 ◽  
Author(s):  
Yusuke Teramoto ◽  
Hiroto Sato ◽  
Kazunori Bessho ◽  
Koji Miyauchi ◽  
Mitsuru Ikeuchi ◽  
...  
Keyword(s):  
Ultraviolet Radiation ◽  
Radiation Source ◽  
Extreme Ultraviolet ◽  
Capillary Discharge ◽  
Extreme Ultraviolet Radiation
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