Low temperature preparation of ferroelectric SrBi2Ta2O9 thin films by a modified RF magnetron sputtering technique

1998 ◽  
Vol 21 (1-4) ◽  
pp. 475-483 ◽  
Author(s):  
Cheol-Hoon Yang ◽  
Jae-Sun Kim ◽  
Soon-Gil Yoon
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Low Temperature Preparation ◽  
Temperature Preparation

Low Temperature Preparation of As-Sputtered Superconducting YBaCuO Thin Films by Magnetron Sputtering

1988 ◽  
Vol 27 (Part 2, No. 7) ◽  
pp. L1260-L1261 ◽  
Author(s):  
Tadao Miura ◽  
Yoshiaki Terashima ◽  
Masayuki Sagoi ◽  
Koichi Kubo
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Magnetron Sputtering ◽  
Low Temperature Preparation ◽  
Temperature Preparation

Substrate Potential Effects on Low-Temperature Preparation of SrTiO3Thin Films by RF Magnetron Sputtering

1993 ◽  
Vol 32 (Part 2, No. 12B) ◽  
pp. L1830-L1833 ◽  
Author(s):  
Munehiro Shibuya ◽  
Mitsuru Nishitsuji ◽  
Masatoshi Kitagawa ◽  
Takeshi Kamada ◽  
Shigenori Hayashi ◽  
...  
Keyword(s):  
Low Temperature ◽  
Magnetron Sputtering ◽  
Rf Magnetron Sputtering ◽  
Substrate Potential ◽  
Low Temperature Preparation ◽  
Temperature Preparation

Low-temperature preparation of highly (111) oriented PZT thin films by a modified sol–gel technique

2000 ◽  
Vol 208 (1-4) ◽  
pp. 541-545 ◽  
Author(s):  
X.J Meng ◽  
J.G Cheng ◽  
B Li ◽  
S.L Guo ◽  
H.J Ye ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Sol Gel ◽  
Pzt Thin Films ◽  
Low Temperature Preparation ◽  
Gel Technique ◽  
Temperature Preparation
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