Low-pressure oxidation of silicon stimulated by low-energy electron bombardment

1985 ◽  
Vol 52 (6) ◽  
pp. 1051-1069 ◽  
Author(s):  
P. Collot ◽  
G. Gautherin ◽  
B. Agius ◽  
S. Rigo ◽  
F. Rochet
Keyword(s):  
Low Pressure ◽  
Electron Bombardment ◽  
Low Energy ◽  
Energy Electron ◽  
Pressure Oxidation ◽  
Low Energy Electron

Spatial distribution of defects in LiF induced by low-energy electron bombardment: Evidence for rapid hot-hole diffusion

1995 ◽  
Vol 51 (22) ◽  
pp. 16403-16406 ◽  
Author(s):  
N. Seifert ◽  
S. Vijayalakshmi ◽  
Q. Yan ◽  
J. L. Allen ◽  
A. V. Barnes ◽  
...  
Keyword(s):  
Spatial Distribution ◽  
Electron Bombardment ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron

Transport and focusing of a low-energy electron beam in low-pressure ionized argon

2008 ◽  
Vol 53 (1) ◽  
pp. 99-104
Author(s):  
V. P. Grigoriev ◽  
T. V. Koval ◽  
V. P. Kukhta ◽  
P. Raharjo ◽  
K. Uemura
Keyword(s):  
Electron Beam ◽  
Low Pressure ◽  
Low Energy ◽  
Energy Electron ◽  
Low Energy Electron
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