Radial behaviour of the electron energy distribution function in the cylindrical magnetron discharge in argon

1999 ◽  
Vol 32 (20) ◽  
pp. 2655-2665 ◽  
Author(s):  
E Passoth ◽  
J F Behnke ◽  
C Csambal ◽  
M Tichý ◽  
P Kudrna ◽  
...  
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

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