scholarly journals Surface profile and stress field evaluation using digital gradient sensing method

2016 ◽  
Vol 27 (9) ◽  
pp. 095203 ◽  
Author(s):  
C Miao ◽  
B M Sundaram ◽  
L Huang ◽  
H V Tippur
Keyword(s):  
Stress Field ◽  
Surface Profile ◽  
Field Evaluation ◽  
Gradient Sensing ◽  
Digital Gradient Sensing

Nanometer-Scale Stress Field Evaluation of Cu∕ILD Structure by Cathodoluminescence Spectroscopy

2007 ◽  
Author(s):  
Masako Kodera ◽  
Sachiyo Ito ◽  
Masahiko Hasunuma ◽  
Shigeru Kakinuma ◽  
Shinichi Ogawa ◽  
...  
Keyword(s):  
Stress Field ◽  
Field Evaluation ◽  
Nanometer Scale ◽  
Cathodoluminescence Spectroscopy
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