A capacitive power sensor based on the MEMS cantilever beam fabricated by GaAs MMIC technology

Journal of Micromechanics and Microengineering ◽

10.1088/0960-1317/23/3/035001 ◽

2013 ◽

Vol 23 (3) ◽

pp. 035001 ◽

Author(s):

Zhenxiang Yi ◽

Xiaoping Liao

Keyword(s):

Cantilever Beam ◽

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High-power electro-mechanical behavior of a capacitive microwave power sensor with warped cantilever beam

Solid-State Electronics ◽

10.1016/j.sse.2020.107877 ◽

2020 ◽

Vol 172 ◽

pp. 107877

Author(s):

Jian-hua Li ◽

Xiaoping Liao

Keyword(s):

Mechanical Behavior ◽

Cantilever Beam ◽

Microwave Power ◽

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High dynamic range microwave power sensor with thermopile and curled cantilever beam

Electronics Letters ◽

10.1049/el.2015.1665 ◽

2015 ◽

Vol 51 (17) ◽

pp. 1341-1343 ◽

Author(s):

Jiabin Yan ◽

Xiaoping Liao ◽

Zhenxiang Yi

Keyword(s):

Cantilever Beam ◽

Microwave Power ◽

Dynamic Range ◽

High Dynamic Range ◽

High Dynamic ◽

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An analytical model for self-assembling microwave power sensor with thermopile and curled cantilever beam

Sensors and Actuators A Physical ◽

10.1016/j.sna.2017.02.015 ◽

2017 ◽

Vol 257 ◽

pp. 98-105 ◽

Author(s):

Jiabin Yan ◽

Zhenxiang Yi ◽

Xiaoping Liao

Keyword(s):

Analytical Model ◽

Cantilever Beam ◽

Microwave Power ◽

Self Assembling ◽

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Improved Dynamic Range of Microwave Power Sensor by MEMS Cantilever Beam

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2017.2754506 ◽

2017 ◽

Vol 26 (6) ◽

pp. 1183-1185 ◽

Author(s):

Chenlei Chu ◽

Xiaoping Liao ◽

Chen Chen

Keyword(s):

Cantilever Beam ◽

Microwave Power ◽

Dynamic Range ◽

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Measurements on Intermodulation Distortion of Capacitive Power Sensor Based on MEMS Cantilever Beam

IEEE Sensors Journal ◽

10.1109/jsen.2013.2293147 ◽

2014 ◽

Vol 14 (3) ◽

pp. 621-622 ◽

Author(s):

Zhenxiang Yi ◽

Xiaoping Liao

Keyword(s):

Cantilever Beam ◽

Intermodulation Distortion ◽

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Investigation of a broadband micromachined thermoelectric microwave power sensor with a cantilever beam

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) ◽

10.1109/transducers.2015.7181139 ◽

2015 ◽

Author(s):

D.B. Wang ◽

Y.M. Fang

Keyword(s):

Cantilever Beam ◽

Microwave Power ◽

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An 8-12GHz capacitive power sensor based on MEMS cantilever beam

2011 IEEE SENSORS Proceedings ◽

10.1109/icsens.2011.6127229 ◽

2011 ◽

Author(s):

Zhenxiang Yi ◽

Xiaoping Liao ◽

Zheng Zhu

Keyword(s):

Cantilever Beam ◽

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Study of bimetallic effect in a GaAs cantilever beam of power sensor microsystem

ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) ◽

10.1109/asdam.1998.730228 ◽

2002 ◽

Author(s):

T. Lalinsky ◽

M. Drzik ◽

S. Hascik ◽

I. Mozolova ◽

J. Kuzmik ◽

...

Keyword(s):

Cantilever Beam ◽

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Research on a Ka-Band MEMS Power Sensor Investigated with an MEMS Cantilever Beam

Chinese Journal of Electronics ◽

10.1049/cje.2020.02.002 ◽

2020 ◽

Vol 29 (2) ◽

pp. 378-384

Author(s):

Debo Wang ◽

Xinfeng Gu ◽

Jiangcheng Xie ◽

Dong Zhang

Keyword(s):

Cantilever Beam ◽

Ka Band ◽

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Possibility of Magnetic Energy Harvesting for Zero-power Sensor

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.137.442 ◽

2017 ◽

Vol 137 (8) ◽

pp. 442-447

Author(s):

Kunihisa Tashiro

Keyword(s):

Energy Harvesting ◽

Magnetic Energy ◽

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