Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma

2005 ◽  
Vol 14 (3) ◽  
pp. 576-580 ◽  
Author(s):  
Sang-Hun Seo ◽  
Jung-Hwan In ◽  
Hong-Young Chang
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

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