Decoupling of dust cloud and embedding plasma for high electron depletion in nanodusty plasmas

In recent years nanoparticles (nps) have become key technological products, e.g. as coatings with tunable optical gap in third generation solar cells, as nanocrystals for photonic applications, and as pharmaceutical nanocarriers. In particle sources, that use reactive, nanodusty plasmas, a high dust density changes the properties of the dusty plasma compared to a dust free plasma considerably, as the electron depletion leads to a reduced number of free electrons. This is called the Havnes effect and was central for the understanding of the famous spokes in Saturns rings. We see here, that it is also important for technological applications. Using self excited dust density waves (DDW) as a diagnostic tool, it is possible for the first time, to completely characterize an argon discharge with embedded amorphous hydrocarbon nps of different size and density. The results show, that electron depletion governs the charge of dust grains, while the size of the particles has only a weak influence. The ion density and electric potential profile are almost independent of both, dust size as well as dust density. This suggests, that the rf generated plasma and the dust cloud coexist and coupling of both is weak.

Radially-dependent ignition process of a pulsed capacitively coupled RF argon plasma over 300 mm-diameter electrodes: multi-fold experimental diagnostics

Temporal evolution of electrical and plasma parameters over 300 mm-diameter electrodes during the pre-ignition, ignition, and post-ignition phases of a pulsed capacitively coupled radio-frequency (RF) argon discharge is investigated by multi-fold experimental diagnostics. The electron density, n e, and the optical emission intensity (OEI) at different radial positions are measured time-resolved by using a hairpin probe and an optical probe, respectively. A B-dot probe is employed to determine the waveforms of the azimuthal magnetic field at different radii, from which the waveforms of the axial current density at corresponding radial positions are derived based on Ampere’s law. Then, the time evolution of the power density at various radii can be calculated, provided that the voltage drop across the electrodes is independent of radius. Meanwhile, the time-dependent total power deposited into the reactor is calculated with the voltage and the current waveforms measured by a voltage and a current probe at the power feeding point. It was found that during pre-ignition phase, the OEI and n e cannot be measurable due to extremely low power deposition when the system exhibits pure capacitive impedance. During the ignition phase, the OEI, the power density, and the current density exhibit the most significant increase at the electrode center, while time evolution of n e seems to exhibit a relatively weak radial dependence. In particular, at small radii, i.e. r ≤ 8 cm, the OEI was observed to change with time in the same manner as the power density during the ignition phase, because the RF power is absorbed primarily by electrons, which dissipate their energy via inelastic collisions. The more drastic ignition at the center is possibly associated with a center-high profile of Ar metastable density at the beginning of each pulse. Shortly, the profile of n e becomes edge-high during the post-ignition phase and remains thereafter until the end of the pulse-on periods. Methodologically, the synergistic diagnostics lay the foundation for extensive studies on spatiotemporal evolution of plasma ignition process under broader conditions, e.g. low gas pressure and very high frequency, widely used by practical etching process.

Simulation of nonlinear standing wave excitation in very-high-frequency asymmetric capacitive discharges: roles of radial plasma density profile and rf power

It is recognized that in large-area, very-high-frequency capacitively coupled plasma (VHF CCP) reactors, the higher harmonics generated by nonlinear sheath motion can lead to enhanced standing wave excitation. In this work, a self-consistent electromagnetic model, which couples a one-dimensional, radial nonlinear transmission line model with a bulk plasma fluid model, is employed to investigate the nonlinear standing wave excitation in a VHF driven, geometrically asymmetric capacitive argon discharge operated at low pressure. By considering a radially nonuniform plasma density profile (case I ) calculated self-consistently by the nonlinear electromagnetic model and the corresponding radially-averaged, uniform plasma density profile (case II ), we first examine the effect of the plasma density nonuniformity on the propagation of electromagnetic surface waves in a 3 Pa argon discharge driven at 100MHz and 90W. Compared to case II, the higher plasma density at the radial center in case I determines a higher plasma series resonance frequency, yielding stronger high-order harmonic excitations and more significant central peak in the harmonic current density Jz,n and the harmonic electron power absorption pn profiles. Therefore, under the assumption of the radially uniform plasma density in a CCP discharge, the self-excitation of higher harmonics at the radial center should be underestimated. Second, using the self-consistent electromagnetic model, the effect of the rf power on the excitation of nonlinear standing waves is investigated in a 3 Pa argon discharge driven at 100MHz. At a low power of 30W, the discharge is dominated by the first two harmonics. The higher harmonic excitations and the nonlinear standing waves are observed to be enhanced with increasing the rf power, resulting in a more pronounced central peak in the radial profiles of the total electron power absorption density pe, the electron temperature Te, and the electron density ne. For all rf powers, the calculated radial profiles of ne show good agreement with the experimental data obtained by a floating double probe.

Surface effects in a capacitive argon discharge in the intermediate pressure regime

One-dimensional particle-in-cell/Monte Carlo collisional (PIC/MCC) simulations are performed on a capacitive 2.54 cm gap, 1.6 Torr argon discharge driven by a sinusoidal rf current density amplitude of 50 A/m2 at 13.56 MHz. The excited argon states (metastable levels, resonance levels, and the 4p manifold) are modeled self-consistently with the particle dynamics as space- and time-varying fluids. Four cases are examined, including and neglecting excited states, and using either a fixed or energy-dependent secondary electron emission yield due to ion and/or neutral impact on the electrodes. The results for all cases show that most of the ionization occurs near the plasma-sheath interfaces, with little ionization within the plasma bulk region. Without excited states, secondary electrons emitted from the electrodes are found to play a strong role in the ionization process. When the excited states, secondary electron emission due to neutral and ion impact on the electrodes are included in the discharge model, the discharge operation transitions from α-mode to γ-mode, in which nearly all the ionization is due to secondary electrons. Excited states are very effective in producing secondary electrons, with approximately 14.7 times the contribution of ion bombardment. Electron impact of ground state argon atoms by secondary electrons contributes about 76 % of the total ionization; primary electrons, about 11 %; metastable Penning ionization, about 13 %; and multi-step ionization, about 0.3 %.

Simulation of Cold Atmospheric Plasma Generated by Floating-Electrode Dielectric Barrier Pulsed Discharge Used for the Cancer Cell Necrosis

A numerical simulation of a pulsed floating electrode dielectric barrier discharge (FE-DBD) at atmospheric pressure, used for melanoma cancer cell therapy, is performed using a plasma model in COMSOL Multiphysics software. Distributions of electron density, space charge, and electric field are presented at different instants of the pulsed argon discharge. Significant results related to the characteristics of the plasma device used, the inter-electrodes distance, and the power supply are obtained to improve the efficiency of FE-DBD apparatus for melanoma cancer cell treatment. The FE-DBD presents a higher sensitivity to short pulse durations, related to the accumulated charge over the dielectric barrier around the powered electrode. At higher applied voltage, more energy is injected into the discharge channel and an increase in electron density and electric consumed power is noted. Anticancer activity provided by the FE-DBD plasma is improved using a small interelectrode distance with a high electron emission coefficient and a high dielectric constant with a small dielectric thickness, allowing higher electron density, generating reactive species responsible for the apoptosis of tumor cells.