Investigation of O-atom kinetics in O2, CO2, H2O and O2/HMDSO low pressure radiofrequency pulsed plasmas by time-resolved optical emission spectroscopy

Plasma Sources Science and Technology ◽

10.1088/0963-0252/16/3/020 ◽

2007 ◽

Vol 16 (3) ◽

pp. 597-605 ◽

Author(s):

A Bousquet ◽

G Cartry ◽

A Granier

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Time Resolved ◽

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Time-resolved measurement of emission profiles in pulsed radiofrequency glow discharge optical emission spectroscopy: Investigation of the pre-peak

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2010.05.011 ◽

2010 ◽

Vol 65 (7) ◽

pp. 533-541 ◽

Author(s):

D. Alberts ◽

P. Horvath ◽

Th. Nelis ◽

R. Pereiro ◽

N. Bordel ◽

...

Keyword(s):

Glow Discharge ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Pulsed Radiofrequency ◽

Time Resolved ◽

Radiofrequency Glow Discharge

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Time-resolved optical emission spectroscopy of pulsed DC magnetron sputtering plasmas

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/38/11/018 ◽

2005 ◽

Vol 38 (11) ◽

pp. 1769-1780 ◽

Author(s):

J Lopez ◽

W Zhu ◽

A Freilich ◽

A Belkind ◽

K Becker

Keyword(s):

Magnetron Sputtering ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Dc Magnetron Sputtering ◽

Time Resolved ◽

Pulsed Dc ◽

Pulsed Dc Magnetron Sputtering

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Measurement Of Resonant And Metastable Densities In A Low Pressure, Microwave Driven, Micro Argon Plasma By Optical Emission Spectroscopy

2017 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2017.8496165 ◽

2017 ◽

Author(s):

Patrick Hermanns ◽

Bastian Hillebrand ◽

Marcel Fiebrandt ◽

Peter Awakowicz

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

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Probing suprathermal electrons by trace rare gases optical emission spectroscopy in low pressure dipolar microwave plasmas excited at the electron cyclotron resonance

Physics of Plasmas ◽

10.1063/1.5045348 ◽

2018 ◽

Vol 25 (9) ◽

pp. 093511 ◽

Author(s):

S. Boivin ◽

X. Glad ◽

L. Latrasse ◽

A. Sarkissian ◽

L. Stafford

Keyword(s):

Cyclotron Resonance ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Electron Cyclotron Resonance ◽

Optical Emission ◽

Low Pressure ◽

Electron Cyclotron ◽

Microwave Plasmas ◽

Suprathermal Electrons

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Time-resolved study of pulsed Ar–N2and Ar–N2–H2microwave surfaguide discharges using optical emission spectroscopy

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/3/035007 ◽

2012 ◽

Vol 21 (3) ◽

pp. 035007 ◽

Author(s):

Nikolay Britun ◽

Thomas Godfroid ◽

Rony Snyders

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

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A Linear Model for the Interpretation of Optical Emission Spectroscopy Measurements in Low Pressure DC Magnetron Sputtering

Contributions to Plasma Physics ◽

10.1002/ctpp.2150370603 ◽

1997 ◽

Vol 37 (6) ◽

pp. 483-497 ◽

Author(s):

J. Schulte ◽

G. Sobe ◽

G. Reiss

Keyword(s):

Magnetron Sputtering ◽

Linear Model ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Dc Magnetron Sputtering

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Measurements of electron density in different low pressure plasmas using the multipole resonance probe, langmuir probe and optical emission spectroscopy

2016 IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2016.7534183 ◽

2016 ◽

Author(s):

Moritz Oberberg ◽

Stefan Ries ◽

Nikita Bibinov ◽

Peter Awakowicz

Keyword(s):

Electron Density ◽

Langmuir Probe ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

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Characterization of a low-pressure argon plasma using optical emission spectroscopy and a global model

Journal of Applied Physics ◽

10.1063/1.2559790 ◽

2007 ◽

Vol 101 (5) ◽

pp. 053306 ◽

Author(s):

A. Palmero ◽

E. D. van Hattum ◽

H. Rudolph ◽

F. H. P. M. Habraken

Keyword(s):

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Argon Plasma ◽

Optical Emission ◽

Low Pressure ◽

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Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas

Physical Review E ◽

10.1103/physreve.60.6016 ◽

1999 ◽

Vol 60 (5) ◽

pp. 6016-6029 ◽

Author(s):

M. V. Malyshev ◽

V. M. Donnelly

Keyword(s):

Low Temperature ◽

Emission Spectroscopy ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Low Temperature Plasmas

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Observation of the transition of operating regions in a low-pressure inductively coupled oxygen plasma by Langmuir probe measurement and optical emission spectroscopy

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/34/18/320 ◽

2001 ◽

Vol 34 (18) ◽

pp. 2854-2861 ◽

Author(s):

Dong-cheol Seo ◽

Tae-hun Chung

Keyword(s):

Langmuir Probe ◽

Emission Spectroscopy ◽

Oxygen Plasma ◽

Optical Emission Spectroscopy ◽

Optical Emission ◽

Low Pressure ◽

Probe Measurement ◽

Inductively Coupled ◽

Operating Regions

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