scholarly journals Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas

2020 ◽  
Vol 29 (2) ◽  
pp. 025019 ◽  
Author(s):  
Máté Vass ◽  
Sebastian Wilczek ◽  
Trevor Lafleur ◽  
Ralf Peter Brinkmann ◽  
Zoltán Donkó ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Power Absorption ◽  
Capacitively Coupled

scholarly journals Observation of dominant Ohmic electron power absorption in capacitively coupled radio frequency argon discharges at low pressure

2020 ◽  
Vol 29 (8) ◽  
pp. 085014 ◽  
Author(s):  
Máté Vass ◽  
Sebastian Wilczek ◽  
Trevor Lafleur ◽  
Ralf Peter Brinkmann ◽  
Zoltán Donkó ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Power Absorption ◽  
Capacitively Coupled

Fast modeling of the low‐pressure capacitively coupled radio‐frequency discharge based on the nonlocal approach

1996 ◽  
Vol 69 (16) ◽  
pp. 2341-2343 ◽  
Author(s):  
S. V. Berezhnoi ◽  
I. D. Kaganovich ◽  
L. D. Tsendin ◽  
V. A. Schweigert
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Capacitively Coupled ◽  
Nonlocal Approach ◽  
Radio Frequency Discharge

scholarly journals Electron power absorption dynamics in magnetized capacitively coupled radio frequency oxygen discharges

2020 ◽  
Vol 29 (10) ◽  
pp. 105004
Author(s):  
Li Wang ◽  
De-Qi Wen ◽  
Peter Hartmann ◽  
Zoltán Donkó ◽  
Aranka Derzsi ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Power Absorption ◽  
Capacitively Coupled
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