radio frequency discharges Recently Published Documents

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Application of sparse grid combination techniques to low temperature plasmas particle-in-cell simulations. I. Capacitively coupled radio frequency discharges

Journal of Applied Physics ◽

10.1063/5.0044363 ◽

2021 ◽

Vol 129 (15) ◽

pp. 153303

Author(s):

L. Garrigues ◽

B. Tezenas du Montcel ◽

G. Fubiani ◽

F. Bertomeu ◽

F. Deluzet ◽

...

Keyword(s):

Low Temperature ◽

Radio Frequency ◽

Sparse Grid ◽

Capacitively Coupled ◽

Particle In Cell ◽

Low Temperature Plasmas

Similarity of capacitive radio-frequency discharges in nonlocal regimes

Physics of Plasmas ◽

10.1063/5.0022788 ◽

2020 ◽

Vol 27 (11) ◽

pp. 113501

Author(s):

Yangyang Fu ◽

Bocong Zheng ◽

Peng Zhang ◽

Qi Hua Fan ◽

John P. Verboncoeur ◽

...

Keyword(s):

Radio Frequency ◽

N2–H2 capacitively coupled radio-frequency discharges at low pressure: II. Modeling results: the relevance of plasma-surface interaction

10.1088/1361-6595/ab9b1b ◽

2020 ◽

Vol 29 (8) ◽

pp. 085023 ◽

Cited By ~ 1

Author(s):

Miguel Jiménez-Redondo ◽

Audrey Chatain ◽

Olivier Guaitella ◽

Guy Cernogora ◽

Nathalie Carrasco ◽

...

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Surface Interaction ◽

Capacitively Coupled ◽

Plasma Surface ◽

A novel ex situ diagnostic technique for characterizing harmonics in radio frequency discharges

Review of Scientific Instruments ◽

10.1063/5.0009015 ◽

2020 ◽

Vol 91 (9) ◽

pp. 094705

Author(s):

Arti Rawat ◽

A. Ganguli ◽

Ramesh Narayanan ◽

R. D. Tarey

Keyword(s):

Radio Frequency ◽

Diagnostic Technique ◽

Ex Situ ◽

N2–H2 capacitively coupled radio-frequency discharges at low pressure. Part I. Experimental results: effect of the H2 amount on electrons, positive ions and ammonia formation

10.1088/1361-6595/ab9b1a ◽

2020 ◽

Vol 29 (8) ◽

pp. 085019 ◽

Cited By ~ 1

Author(s):

Audrey Chatain ◽

Miguel Jiménez-Redondo ◽

Ludovic Vettier ◽

Olivier Guaitella ◽

Nathalie Carrasco ◽

...

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Experimental Results ◽

Capacitively Coupled ◽

Positive Ions ◽

Pressure Part ◽

Ammonia Formation

The magnetic asymmetry effect in geometrically asymmetric capacitively coupled radio frequency discharges operated in Ar/O2

10.1088/1361-6595/ab9b31 ◽

2020 ◽

Vol 29 (7) ◽

pp. 075013

Author(s):

M Oberberg ◽

B Berger ◽

M Buschheuer ◽

D Engel ◽

C Wölfel ◽

...

Keyword(s):

Radio Frequency ◽

Asymmetry Effect ◽

Capacitively Coupled ◽

Magnetic Asymmetry

2020 IEEE International Conference on Advances in Electrical Engineering and Computer Applications( AEECA) ◽

Electron Heating Dynamics in Capacitively Coupled Plasmas Radio-Frequency Discharges at Low Pressures

10.1109/aeeca49918.2020.9213688 ◽

2020 ◽

Author(s):

Lulu Zhao ◽

Tagra Samir ◽

Huizhen Yan

Keyword(s):

Radio Frequency ◽

Electron Heating ◽

Capacitively Coupled ◽

Coupled Plasmas ◽

Low Pressures

Surface processes in low-pressure capacitive radio frequency discharges driven by tailored voltage waveforms

10.1088/1361-6595/ab9156 ◽

2020 ◽

Vol 29 (7) ◽

pp. 074001

Author(s):

A Derzsi ◽

B Horváth ◽

Z Donkó ◽

J Schulze

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Surface Processes ◽

Electron dynamics in low pressure capacitively coupled radio frequency discharges

Journal of Applied Physics ◽

10.1063/5.0003114 ◽

2020 ◽

Vol 127 (18) ◽

pp. 181101 ◽

Cited By ~ 4

Author(s):

S. Wilczek ◽

J. Schulze ◽

R. P. Brinkmann ◽

Z. Donkó ◽

J. Trieschmann ◽

...

Keyword(s):

Radio Frequency ◽

Low Pressure ◽

Electron Dynamics ◽

Capacitively Coupled ◽