Research of a micromechanical accelerometer with three sensitivity axes

Journal of Physics Conference Series ◽

10.1088/1742-6596/1695/1/012164 ◽

2020 ◽

Vol 1695 ◽

pp. 012164

Author(s):

I E Lysenko ◽

O A Ezhova ◽

A V Tkachenko ◽

D V Naumenko

Keyword(s):

Micromechanical Accelerometer

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Calculation of Stiffness and Elasticity Coefficient of Sensitive Element of Micromechanical Accelerometer

Proceedings of Universities ELECTRONICS ◽

10.24151/1561-5405-2018-23-6-625-629 ◽

2018 ◽

Vol 23 (6) ◽

pp. 625-629

Author(s):

B.M. Simonov ◽

◽

V.N. Goroshko ◽

A.S. Timoshenkov ◽

◽

...

Keyword(s):

Sensitive Element ◽

Elasticity Coefficient ◽

Micromechanical Accelerometer

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Simulation of a Sensitive Element of a Sandwich Structure of a Capacitive Micromechanical Accelerometer Based on the Dielectric Constant Changes

Proceedings of Universities ELECTRONICS ◽

10.24151/1561-5405-2020-25-2-155-166 ◽

2020 ◽

Vol 25 (2) ◽

pp. 155-166

Author(s):

Ye Ko Ko Aung ◽

◽

B.M. Simonov ◽

S.P. Timoshenkov ◽

◽

...

Keyword(s):

Dielectric Constant ◽

Sensitive Element ◽

Sandwich Structure ◽

Micromechanical Accelerometer

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Linearity enhancement of scale factor in an optical interrogated micromechanical accelerometer

Applied Optics ◽

10.1364/ao.55.006115 ◽

2016 ◽

Vol 55 (22) ◽

pp. 6115 ◽

Author(s):

Yu Zhang ◽

Lishuang Feng ◽

Xiao Wang ◽

Yang Wang

Keyword(s):

Scale Factor ◽

Micromechanical Accelerometer

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Micromechanical accelerometer integrated with MOS detection circuitry

10.1109/iedm.1980.189925 ◽

1980 ◽

Author(s):

K. Petersen ◽

A. Shartel

Keyword(s):

Micromechanical Accelerometer

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Micromechanical accelerometer integrated with MOS detection circuitry

IEEE Transactions on Electron Devices ◽

10.1109/t-ed.1982.20653 ◽

1982 ◽

Vol 29 (1) ◽

pp. 23-27 ◽

Author(s):

K.E. Petersen ◽

A. Shartel ◽

N.F. Raley

Keyword(s):

Micromechanical Accelerometer

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System Damping Ratio Analysis of a Capacitive Micromechanical Accelerometer

2005 6th International Conference on Electronic Packaging Technology ◽

10.1109/icept.2005.1564696 ◽

2006 ◽

Author(s):

Liu Xiaowei ◽

Chen Hong ◽

Chen Weiping

Keyword(s):

Damping Ratio ◽

Ratio Analysis ◽

Micromechanical Accelerometer

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Orthotropic direction effect on stress-strain state of temperature-perturbed sensing element of micromechanical accelerometer

Scientific and technical journal of information technologies mechanics and optics ◽

10.17586/2226-1494-2018-18-1-147-152 ◽

2018 ◽

pp. 147-152

Author(s):

S.A. Galkina ◽

M.A. Barulina

Keyword(s):

Strain State ◽

Sensing Element ◽

Stress Strain ◽

Stress Strain State ◽

Micromechanical Accelerometer ◽

Direction Effect

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Parameters of Sensitive Element of Capacitive Micromechanical Accelerometer with Sandwich Construction

Proceedings of Universities ELECTRONICS ◽

10.24151/1561-5405-2019-24-3-257-266 ◽

2019 ◽

Vol 24 (3) ◽

pp. 257-266 ◽

Author(s):

Ye Ko Ko Aung ◽

◽

Aung Thura ◽

Boris M. Simonov ◽

Sergey P. Timoshenkov ◽

...

Keyword(s):

Sensitive Element ◽

Sandwich Construction ◽

Micromechanical Accelerometer

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Modeling the Sensitive Element of the Sandwich Construction of a Capacitive Micromechanical Accelerometer, Taking into Account the Change in the Dielectric Constant

Russian Microelectronics ◽

10.1134/s1063739721070027 ◽

2021 ◽

Vol 50 (7) ◽

pp. 549-554

Author(s):

Ye Koh Koh Aung ◽

B. M. Simonov ◽

S. P. Timoshenkov

Keyword(s):

Dielectric Constant ◽

Sensitive Element ◽

Sandwich Construction ◽

Micromechanical Accelerometer

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Influence of the Nonisotropy of a Material on the Deformation of the Sensitive Element of a Micromechanical Accelerometer

Nano- i Mikrosistemnaya Tehnika ◽

10.17587/nmst.21.14-23 ◽

2019 ◽

Vol 21 (1) ◽

pp. 14-23

Author(s):

S.A. Galkina ◽

◽

M.A. Barulina ◽

Keyword(s):

Sensitive Element ◽

Micromechanical Accelerometer

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