scholarly journals High-Bandwidth Dynamic Full-Field Profilometry for Nano-Scale Characterization of MEMS

2006 ◽  
Vol 48 ◽  
pp. 1058-1062 ◽  
Author(s):  
Liang-Chia Chen ◽  
Yao-Ting Huang ◽  
Pi-Bai Chang
Author(s):  
L. Evan Reddick ◽  
Prakitchai Chotewutmontri ◽  
Will Crenshaw ◽  
Ashita Dave ◽  
Michael Vaughn ◽  
...  

2014 ◽  
Vol 20 (S3) ◽  
pp. 1808-1809 ◽  
Author(s):  
James I. Cole ◽  
Assel Aitkaliyeva ◽  
James W. Madden ◽  
Brandon D. Miller

2008 ◽  
Vol 19 (12) ◽  
pp. 125303 ◽  
Author(s):  
Liang-Chia Chen ◽  
Yao-Ting Huang ◽  
Huang-Wen Lai ◽  
Jin-Liang Chen ◽  
Calvin C Chang

2017 ◽  
Vol 684 ◽  
pp. 373-384 ◽  
Author(s):  
Zhe Chen ◽  
Magnus Hörnqvist Colliander ◽  
Gustav Sundell ◽  
Ru Lin Peng ◽  
Jinming Zhou ◽  
...  

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