a-Si thin-film growth by sputtering: A Monte Carlo study
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1996 ◽
Vol 220
(4-5)
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pp. 247-250
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2006 ◽
Vol 212
(1)
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pp. 305-317
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1993 ◽
Vol 44
(1)
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pp. 67-99
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2010 ◽
Vol 50
(1)
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pp. 6-9
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2003 ◽
Vol 58
(14)
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pp. 3115-3129
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2009 ◽
Vol 191
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pp. 012017
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2000 ◽
Vol 69
(11)
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pp. 3607-3613
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