Estimation and control of surface roughness in thin film growth using kinetic Monte-Carlo models

2003 ◽  
Vol 58 (14) ◽  
pp. 3115-3129 ◽  
Author(s):  
Yiming Lou ◽  
Panagiotis D. Christofides
Keyword(s):  
Thin Film ◽  
Surface Roughness ◽  
Monte Carlo ◽  
Film Growth ◽  
Kinetic Monte Carlo ◽  
Thin Film Growth ◽  
Estimation And Control ◽  
And Control

Kinetic Monte Carlo simulation of Cu thin film growth

Vacuum ◽  
2004 ◽  
Vol 72 (4) ◽  
pp. 405-410 ◽  
Author(s):  
Peifeng Zhang ◽  
Xiaoping Zheng ◽  
Suoping Wu ◽  
Jun Liu ◽  
Deyan He
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Film Growth ◽  
Kinetic Monte Carlo ◽  
Thin Film Growth ◽  
Kinetic Monte Carlo Simulation ◽  
Cu Thin Film
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