A 3D finite element analysis coupled to the impedance boundary condition for the magnetodynamic problem in radiofrequency plasma devices

1996 ◽  
Vol 32 (3) ◽  
pp. 812-815 ◽  
Author(s):  
F.-Z. Louai ◽  
D. Benzerga ◽  
M. Feliachi ◽  
F. Bouillault
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