Structured uncertainty modeling of position-dependent model variations for an ultra-precision stage

2012 ◽  
Author(s):  
Yang Jin ◽  
Yin Wensheng ◽  
Zhu Yu ◽  
Duan Guanghong
Keyword(s):  
Uncertainty Modeling ◽  
Precision Stage ◽  
Structured Uncertainty ◽  
Ultra Precision ◽  
Dependent Model

THE EVALUATION OF SURFACE MORPHOLOGY USING FLEXURE GUIDED NANO-POSITIONING SYSTEM AND ULTRA-PRECISION LATHE

2012 ◽  
Vol 06 ◽  
pp. 172-177
Author(s):  
Nam-Su Kwak ◽  
Jae-Yeol Kim
Keyword(s):  
Surface Morphology ◽  
Piezoelectric Actuator ◽  
Control Method ◽  
Positioning System ◽  
Motion Error ◽  
Precision Stage ◽  
Cnc Lathe ◽  
Single Crystal Diamond ◽  
Ultra Precision ◽  
And Control

In this study, piezoelectric actuator, Flexure guide, Power transmission element and control method and considered for Nano-positioning system apparatus. The main objectives of this thesis were to develop the 3-axis Ultra-precision stages which enable the 3-axis control by the manipulation of the piezoelectric actuator and to enhance the precision of the Ultra-Precision CNC lathe which is responsible for the ductile mode machining of the hardened-brittle material where the machining is based on the single crystal diamond. Ultra-precision CNC lathe is used for machining and motion error of the machine are compensated by using 3-axis Ultra-precision stage. Through the simulation and experiments on ultra-precision positioning, stability and priority on Nano-positioning system with 3-axis ultra-precision stage and control algorithm are secured by using NI Labview. And after applying the system, is to analyze the surface morphology of the mold steel (SKD61)

Self-calibration for 2-D ultra-precision stage

2012 ◽  
Vol 20 (9) ◽  
pp. 1960-1966 ◽  
Author(s):  
崔继文 CUI Ji-wen ◽  
刘雪明 LIU Xue-ming ◽  
谭久彬 TAN Jiu-bin
Keyword(s):  
Precision Stage ◽  
Self Calibration ◽  
Ultra Precision

scholarly journals Decoupling Method of Ultra Precision Stage using Parallel Linkages Mechanism.

1991 ◽  
Vol 57 (6) ◽  
pp. 1078-1084 ◽  
Author(s):  
Yoshiyuki TOMITA ◽  
Fumiaki SATO ◽  
Kazuhiro ITO ◽  
Yasusi KOYANAGAWA
Keyword(s):  
Decoupling Method ◽  
Precision Stage ◽  
Ultra Precision
Sign in / Sign up

Export Citation Format

Share Document