Intelligent Scheduling Methods for Challenges of Cluster Tools with Concurrent Processing of Multiple Wafer Types*

2020 ◽  
Author(s):  
Jinchao Fu ◽  
Chunrong Pan ◽  
Wenqing Xiong
Keyword(s):  
Concurrent Processing ◽  
Cluster Tools ◽  
Intelligent Scheduling

Scheduling cluster tools for concurrent processing of two wafer types with PM sharing

2015 ◽  
Vol 53 (19) ◽  
pp. 6007-6022 ◽  
Author(s):  
Jun-Ho Lee ◽  
Hyun-Jung Kim ◽  
Tae-Eog Lee
Keyword(s):  
Concurrent Processing ◽  
Cluster Tools

Scheduling Cluster Tools for Concurrent Processing of Two Wafer Types

2014 ◽  
Vol 11 (2) ◽  
pp. 525-536 ◽  
Author(s):  
Jun-Ho Lee ◽  
Hyun-Jung Kim ◽  
Tae-Eog Lee
Keyword(s):  
Concurrent Processing ◽  
Cluster Tools

Scheduling Dual-Armed Cluster Tools for Concurrent Processing of Multiple Wafer Types With Identical Job Flows

2019 ◽  
Vol 16 (3) ◽  
pp. 1058-1070 ◽  
Author(s):  
Sung-Gil Ko ◽  
Tae-Sun Yu ◽  
Tae-Eog Lee
Keyword(s):  
Job Flows ◽  
Concurrent Processing ◽  
Cluster Tools

Intelligent Scheduling Problems

1997 ◽  
Vol 48 (5) ◽  
pp. 542-542
Keyword(s):  
Scheduling Problems ◽  
Intelligent Scheduling

Intelligent Scheduling Method of Molten Iron Transportation of Steel Enterprise

2007 ◽  
Author(s):  
De-Hong Cong ◽  
Jia Wang ◽  
Xing-gang Liu ◽  
Xiao-chuan Luo ◽  
Shan-qing Li
Keyword(s):  
Molten Iron ◽  
Scheduling Method ◽  
Intelligent Scheduling

Concurrent processing adaptation of aeroelastic analysis of propfans

1990 ◽  
Author(s):  
DURBHA MURTHY ◽  
DAVID JANETZKE
Keyword(s):  
Concurrent Processing ◽  
Aeroelastic Analysis

Scheduling Algorithm of Multi-cluster Tools Based on Time Constraint Sets

2012 ◽  
Vol 38 (3) ◽  
pp. 479-484 ◽  
Author(s):  
Ming-Xiang LIU ◽  
Bing-Hai ZHOU
Keyword(s):  
Scheduling Algorithm ◽  
Time Constraint ◽  
Cluster Tools ◽  
Constraint Sets

scholarly journals Short-Term Scheduling Model of Cluster Tool in Wafer Fabrication

Mathematics ◽  
2021 ◽  
Vol 9 (9) ◽  
pp. 1029
Author(s):  
Ying-Mei Tu
Keyword(s):  
Arrival Time ◽  
Time Estimation ◽  
Advanced Technology ◽  
Shop Floor ◽  
Process Time ◽  
Short Term ◽  
Work In Process ◽  
Scheduling Model ◽  
Cluster Tools ◽  
Cluster Tool

Since last decade, the cluster tool has been mainstream in modern semiconductor manufacturing factories. In general, the cluster tool occupies 60% to 70% of production machines for advanced technology factories. The most characteristic feature of this kind of equipment is to integrate the relevant processes into one single machine to reduce wafer transportation time and prevent wafer contaminations as well. Nevertheless, cluster tools also increase the difficulty of production planning significantly, particularly for shop floor control due to complicated machine configurations. The main objective of this study is to propose a short-term scheduling model. The noteworthy goal of scheduling is to maximize the throughput within time constraints. There are two modules included in this scheduling model—arrival time estimation and short-term scheduling. The concept of the dynamic cycle time of the product’s step is applied to estimate the arrival time of the work in process (WIP) in front of machine. Furthermore, in order to avoid violating the time constraint of the WIP, an algorithm to calculate the latest time of the WIP to process on the machine is developed. Based on the latest process time of the WIP and the combination efficiency table, the production schedule of the cluster tools can be re-arranged to fulfill the production goal. The scheduling process will be renewed every three hours to make sure of the effectiveness and good performance of the schedule.

scholarly journals Service functional testing automation with intelligent scheduling and planning

2016 ◽  
Author(s):  
Lom Messan Hillah ◽  
Ariele-Paolo Maesano ◽  
Libero Maesano ◽  
Fabio De Rosa ◽  
Fabrice Kordon ◽  
...  
Keyword(s):  
Functional Testing ◽  
Intelligent Scheduling
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