Stuctural and electrical characterizations of long pulse xecl excimer laser annealed Al/sup +/ ion implanted 4H-SiC

2005 ◽  
Author(s):  
C. Dutto ◽  
E. Fogarassy ◽  
D. Mathiot ◽  
D. Muller ◽  
P. Kern ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Long Pulse ◽  
Electrical Characterizations ◽  
Xecl Excimer Laser ◽  
Ion Implanted

Long-pulse duration excimer laser annealing of Al+ ion implanted 4H-SiC for pn junction formation

2003 ◽  
Vol 208-209 ◽  
pp. 292-297 ◽  
Author(s):  
C. Dutto ◽  
E. Fogarassy ◽  
D. Mathiot ◽  
D. Muller ◽  
P. Kern ◽  
...  
Keyword(s):  
Pulse Duration ◽  
Excimer Laser ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Pn Junction ◽  
Junction Formation ◽  
Long Pulse ◽  
Ion Implanted

On the beam pointing variation of a long pulse XeCl excimer laser fitted with unstable resonators

1998 ◽  
Vol 157 (1-6) ◽  
pp. 121-127 ◽  
Author(s):  
R.M Hofstra ◽  
M.J Zwegers ◽  
F.A van Goor ◽  
W.J Witteman
Keyword(s):  
Excimer Laser ◽  
Unstable Resonators ◽  
Long Pulse ◽  
Xecl Excimer Laser

High speed drilling of metals with a long pulse XeCl excimer laser

2002 ◽  
Author(s):  
Aart Schoonderbeek ◽  
Cornelis A. Biesheuvel ◽  
Ramon M. Hofstra ◽  
Klaus-J. Boller ◽  
Johan Meijer
Keyword(s):  
Excimer Laser ◽  
High Speed ◽  
High Speed Drilling ◽  
Long Pulse ◽  
Xecl Excimer Laser

scholarly journals Beam divergence studies on a long-pulse XeCl excimer laser

1996 ◽  
Author(s):  
Ramon M. Hofstra ◽  
Frederik A. van Goor ◽  
Wilhelmus J. Witteman
Keyword(s):  
Excimer Laser ◽  
Beam Divergence ◽  
Long Pulse ◽  
Xecl Excimer Laser

Variable reflectivity unstable resonators for a long pulse XeCl excimer laser

1998 ◽  
Vol 150 (1-6) ◽  
pp. 163-169 ◽  
Author(s):  
R.M Hofstra ◽  
M.J Zwegers ◽  
F.A van Goor ◽  
W.J Witteman
Keyword(s):  
Excimer Laser ◽  
Unstable Resonators ◽  
Long Pulse ◽  
Xecl Excimer Laser

High-speed drilling of metals with a long-pulse XeCl excimer laser

2002 ◽  
Author(s):  
Aart Schoonderbeek ◽  
Cornelis A. Biesheuvel ◽  
Ramon M. Hofstra ◽  
Klaus-Jochen Boller ◽  
Johan Meijer
Keyword(s):  
Excimer Laser ◽  
High Speed ◽  
High Speed Drilling ◽  
Long Pulse ◽  
Xecl Excimer Laser
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