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Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net
2006 IEEE International Conference on Automation Science and Engineering
◽
10.1109/coase.2006.326860
◽
2006
◽
Cited By ~ 11
Author(s):
Naiqi Wu
◽
Mengchu Zhou
Keyword(s):
Petri Net
◽
Time Constraints
◽
Cluster Tools
◽
Dual Arm
◽
Residency Time
Download Full-text
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References
Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints
2013 10th IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC)
◽
10.1109/icnsc.2013.6548746
◽
2013
◽
Author(s):
Yan Qiao
◽
NaiQi Wu
◽
MengChu Zhou
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QingYun Dai
Keyword(s):
Petri Net
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Time Constraints
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Scheduling Analysis
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Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation
IEEE Transactions on Semiconductor Manufacturing
◽
10.1109/tsm.2012.2199338
◽
2012
◽
Vol 25
(3)
◽
pp. 432-446
◽
Cited By ~ 60
Author(s):
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◽
MengChu Zhou
Keyword(s):
Petri Net
◽
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◽
Sojourn Time
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Time Constraints
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Time Analysis
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Activity Time
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Cluster Tools
◽
Residency Time
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Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule
IEEE Transactions on Systems Man and Cybernetics Systems
◽
10.1109/tsmc.2014.2347928
◽
2015
◽
Vol 45
(3)
◽
pp. 472-484
◽
Cited By ~ 24
Author(s):
Yan Qiao
◽
NaiQi Wu
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Keyword(s):
Time Constraints
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Scheduling Analysis
◽
Cluster Tools
◽
Dual Arm
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Residency Time
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Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints
IEEE/CAA Journal of Automatica Sinica
◽
10.1109/jas.2020.1003150
◽
2020
◽
Vol 7
(3)
◽
pp. 776-789
◽
Cited By ~ 1
Author(s):
Jipeng Wang
◽
Hesuan Hu
◽
Chunrong Pan
◽
Yuan Zhou
◽
Liang Li
Keyword(s):
Time Constraints
◽
Cluster Tools
◽
Dual Arm
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Residency Time
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Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints
IEEE Transactions on Industrial Informatics
◽
10.1109/tii.2013.2272702
◽
2014
◽
Vol 10
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◽
pp. 286-300
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Cited By ~ 51
Author(s):
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Keyword(s):
Time Constraints
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Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net
Proceedings of 2012 9th IEEE International Conference on Networking, Sensing and Control
◽
10.1109/icnsc.2012.6204887
◽
2012
◽
Cited By ~ 2
Author(s):
Yan Qiao
◽
Nai Qi Wu
◽
Meng Chu Zhou
Keyword(s):
Real Time
◽
Petri Net
◽
Time Variation
◽
Control Policy
◽
Time Constraints
◽
Activity Time
◽
Real Time Control
◽
Time Control
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Cluster Tools
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Residency Time
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Modeling and Schedulability Analysis of Single-Arm Cluster Tools with Wafer Residency Time Constraints Using Petri Net
2008 IEEE International Conference on Networking, Sensing and Control
◽
10.1109/icnsc.2008.4525188
◽
2008
◽
Cited By ~ 4
Author(s):
Naiqi Wu
◽
Chengbin Chu
◽
Feng Chu
◽
MengChu Zhou
Keyword(s):
Petri Net
◽
Schedulability Analysis
◽
Time Constraints
◽
Cluster Tools
◽
Residency Time
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Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints
IEEE Transactions on Systems Man and Cybernetics Systems
◽
10.1109/tsmc.2019.2899590
◽
2019
◽
pp. 1-18
◽
Cited By ~ 2
Author(s):
Yan Qiao
◽
SiWei Zhang
◽
NaiQi Wu
◽
MengChu Zhou
◽
ZhiWu Li
◽
...
Keyword(s):
Time Constraints
◽
Efficient Approach
◽
Cluster Tools
◽
Dual Arm
◽
Residency Time
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Petri net modeling and real-time control of dual-arm cluster tools with residency time constraint and activity time variations
2008 IEEE International Conference on Automation Science and Engineering
◽
10.1109/coase.2008.4626482
◽
2008
◽
Author(s):
NaiQi Wu
◽
MengChu Zhou
◽
ShihSen Peng
◽
Feng Chu
◽
Chengbin Chu
Keyword(s):
Real Time
◽
Petri Net
◽
Time Constraint
◽
Activity Time
◽
Real Time Control
◽
Time Control
◽
Cluster Tools
◽
Time Variations
◽
Dual Arm
◽
Residency Time
Download Full-text
A Petri Net Method for Schedulability and Scheduling Problems in Single-Arm Cluster Tools With Wafer Residency Time Constraints
IEEE Transactions on Semiconductor Manufacturing
◽
10.1109/tsm.2008.2000425
◽
2008
◽
Vol 21
(2)
◽
pp. 224-237
◽
Cited By ~ 154
Author(s):
Naiqi Wu
◽
Chengbin Chu
◽
Feng Chu
◽
Meng Chu Zhou
Keyword(s):
Petri Net
◽
Time Constraints
◽
Scheduling Problems
◽
Cluster Tools
◽
Net Method
◽
Residency Time
Download Full-text
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