Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2347928 ◽

2015 ◽

Vol 45 (3) ◽

pp. 472-484 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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Petri net-based scheduling analysis of dual-arm cluster tools subject to wafer revisiting and residency time constraints

2013 10th IEEE INTERNATIONAL CONFERENCE ON NETWORKING, SENSING AND CONTROL (ICNSC) ◽

10.1109/icnsc.2013.6548746 ◽

2013 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou ◽

QingYun Dai

Keyword(s):

Petri Net ◽

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

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Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net

2006 IEEE International Conference on Automation Science and Engineering ◽

10.1109/coase.2006.326860 ◽

2006 ◽

Author(s):

Naiqi Wu ◽

Mengchu Zhou

Keyword(s):

Petri Net ◽

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

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Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

IEEE/CAA Journal of Automatica Sinica ◽

10.1109/jas.2020.1003150 ◽

2020 ◽

Vol 7 (3) ◽

pp. 776-789 ◽

Author(s):

Jipeng Wang ◽

Hesuan Hu ◽

Chunrong Pan ◽

Yuan Zhou ◽

Liang Li

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

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Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints

IEEE Transactions on Industrial Informatics ◽

10.1109/tii.2013.2272702 ◽

2014 ◽

Vol 10 (1) ◽

pp. 286-300 ◽

Author(s):

Yan Qiao ◽

Naiqi Wu ◽

Meng Chu Zhou

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

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Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2019.2899590 ◽

2019 ◽

pp. 1-18 ◽

Author(s):

Yan Qiao ◽

SiWei Zhang ◽

NaiQi Wu ◽

MengChu Zhou ◽

ZhiWu Li ◽

...

Keyword(s):

Time Constraints ◽

Efficient Approach ◽

Cluster Tools ◽

Dual Arm ◽

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Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2012.2199338 ◽

2012 ◽

Vol 25 (3) ◽

pp. 432-446 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Time Variation ◽

Sojourn Time ◽

Time Constraints ◽

Time Analysis ◽

Activity Time ◽

Cluster Tools ◽

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A Closed-Form Solution for Schedulability and Optimal Scheduling of Dual-Arm Cluster Tools With Wafer Residency Time Constraint Based on Steady Schedule Analysis

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2008.2008633 ◽

2010 ◽

Vol 7 (2) ◽

pp. 303-315 ◽

Author(s):

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Closed Form ◽

Closed Form Solution ◽

Form Solution ◽

Time Constraint ◽

Optimal Scheduling ◽

Cluster Tools ◽

Dual Arm ◽

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Modeling, Analysis and Control of Dual-Arm Cluster Tools With Residency Time Constraint and Activity Time Variation Based on Petri Nets

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2011.2178023 ◽

2012 ◽

Vol 9 (2) ◽

pp. 446-454 ◽

Author(s):

Nai Qi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Time Constraint ◽

Activity Time ◽

Modeling Analysis ◽

Cluster Tools ◽

And Control ◽

Dual Arm ◽

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A novel failure response policy for single-arm cluster tools with residency time constraints

2014 IEEE International Conference on Systems, Man, and Cybernetics (SMC) ◽

10.1109/smc.2014.6973894 ◽

2014 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

ChunRong Pan ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Response Policy ◽

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Cyclic Scheduling Analysis of Single-arm Cluster Tools with Wafer Residency Time Constraint and Chamber Cleaning Operations

2018 IEEE 14th International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2018.8560461 ◽

2018 ◽

Author(s):

FaJun Yang ◽

NaiQi Wu ◽

Rong Su ◽

Yan Qiao

Keyword(s):

Time Constraint ◽

Cyclic Scheduling ◽

Scheduling Analysis ◽

Cluster Tools ◽

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