Schottky barrier height reduction of NiGe/Ge junction by P ion implantation for metal source/drain Ge CMOS devices

2014 ◽  
Author(s):  
Hiroshi Oka ◽  
Yuya Minoura ◽  
Takuji Hosoi ◽  
Takayoshi Shimura ◽  
Heiji Watanabe
Keyword(s):  
Ion Implantation ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Metal Source ◽  
Height Reduction

Low Electron Schottky Barrier Height of NiGe/Ge Achieved by Ion Implantation After Germanidation Technique

2012 ◽  
Vol 33 (12) ◽  
pp. 1687-1689 ◽  
Author(s):  
Zhiqiang Li ◽  
Xia An ◽  
Min Li ◽  
Quanxin Yun ◽  
Meng Lin ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height

Schottky Barrier Height Reduction for p-ZnSe Contacts by Sulfur Treatment

1996 ◽  
Vol 35 (Part 1, No. 2B) ◽  
pp. 1428-1430 ◽  
Author(s):  
Masaaki Onomura ◽  
Shinji Saito ◽  
John Rennie ◽  
Yukie Nishikawa ◽  
Peter J. Parbrook ◽  
...  
Keyword(s):  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Height Reduction

Effective Modulation of Ni Silicide Schottky Barrier Height Using Chlorine Ion Implantation and Segregation

2009 ◽  
Vol 30 (11) ◽  
pp. 1140-1142 ◽  
Author(s):  
Wei-Yip Loh ◽  
H. Etienne ◽  
B. Coss ◽  
I. Ok ◽  
D. Turnbaugh ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Chlorine Ion

Schottky Barrier Height Reduction for p-ZnSe Contacts by Sulfur Treatment

1995 ◽  
Author(s):  
M. Onomura ◽  
S. Saito ◽  
J. Rennie ◽  
Y. Nishikawa ◽  
P. J. Parbrook ◽  
...  
Keyword(s):  
Schottky Barrier ◽  
Barrier Height ◽  
Schottky Barrier Height ◽  
Height Reduction
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