Experimental investigation of parametric evasion properties of resonant sensors using electrostatic gap-closing actuation
2010 ◽
Vol 162
(2)
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pp. 329-335
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2019 ◽
Vol 297
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pp. 111504
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Keyword(s):
2005 ◽
Vol 60
(9)
◽
pp. 1041-1042
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Keyword(s):