Inline multilayer thickness sensing by using terahertz time-domain spectroscopy in reflection geometry

Author(s):  
S. Krimi ◽  
J. Klier ◽  
M. Herrmann ◽  
J. Jonuscheit ◽  
R. Beigang
2016 ◽  
Vol 100 ◽  
pp. 892-899 ◽  
Author(s):  
Arvin I. Mabilangan ◽  
Lorenzo P. Lopez ◽  
Maria Angela B. Faustino ◽  
Joselito E. Muldera ◽  
Neil Irvin F. Cabello ◽  
...  

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