Amplitude and Phase Drift Correction of EFPI Sensor Systems Using Both Adaptive Kalman Filter and Temperature Compensation for Nanometric Displacement Estimation
2012 ◽
Vol 30
(13)
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pp. 2195-2202
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Keyword(s):
Keyword(s):
2013 ◽
Vol 62
(2)
◽
pp. 251-265
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Keyword(s):
2021 ◽
Vol 150
◽
pp. 107326