SU-8 2002 Surface Micromachined Deformable Membrane Mirrors
2013 ◽
Vol 22
(1)
◽
pp. 94-106
◽
2009 ◽
Vol 8
(4)
◽
pp. 043040
◽
2013 ◽
Vol 21
(3)
◽
pp. 579-589
◽
2017 ◽
Vol 23
(4)
◽
pp. 1322-1331
◽
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