High-Aspect-Ratio Metal Microfabrication by Nickel Electroplating of Patterned Carbon Nanotube Forests

2015 ◽  
Vol 24 (5) ◽  
pp. 1331-1337 ◽  
Author(s):  
Lawrence K. Barrett ◽  
Dallin J. Barton ◽  
Steven G. Noyce ◽  
David D. Allred ◽  
Richard R. Vanfleet ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Nickel Electroplating ◽  
Carbon Nanotube Forests

High-aspect-ratio, free-form patterning of carbon nanotube forests using micro-electro-discharge machining

2010 ◽  
Vol 19 (11) ◽  
pp. 1405-1410 ◽  
Author(s):  
Waqas Khalid ◽  
Mohamed Sultan Mohamed Ali ◽  
Masoud Dahmardeh ◽  
Yongho Choi ◽  
Parham Yaghoobi ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Free Form ◽  
Electro Discharge Machining ◽  
Carbon Nanotube Forests

High-Aspect-Ratio Electroplated Structures With 2μm Beamwidth

1999 ◽  
Author(s):  
Xiaobin Li ◽  
Siddharth Kiyawat ◽  
Hector J. De Los Santos ◽  
Chang-Jin “CJ” Kim
Keyword(s):  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Stress Gradient ◽  
Optimization Method ◽  
Nickel Layer ◽  
Driving Voltage ◽  
Aspect Ratios ◽  
Nickel Electroplating ◽  
Electroplating Process ◽  
Micro Structures

Abstract Narrow beamwidth is highly desirable for many micromechanical elements moving parallel to the substrate. A good example is the electrostatically driven flexure structure, whose driving voltage is determined by the width of the beam. This paper presents the process flow and the result of a high-aspect-ratio electroplating process using photoresist (PR) molds. Following a systematic optimization method, PR molds with aspect ratios up to 4.0 were fabricated with a beamwidth of only 2.1μm. Higher aspect ratios, up to 6.8, were achieved using PR double coating technique, with a beamwidth of 2.6μm. Using a Cr/Cu seed layer, nickel electroplating was successfully carried out to translate the PR molds into nickel micro-structures. We observed bend-down of the fully released nickel cantilevers that are over 8μm thick. Further investigation suggested a combined effect of residual stress gradient in the electroplated nickel layer and in-use stiction of the cantilever beams.

A rapid growth of aligned carbon nanotube films and high-aspect-ratio arrays

2006 ◽  
Vol 35 (2) ◽  
pp. 195-199 ◽  
Author(s):  
Lingbo Zhu ◽  
Jianwen Xu ◽  
Yonghao Xiu ◽  
Dennis W. Hess ◽  
C. P. Wong
Keyword(s):  
Carbon Nanotube ◽  
Aspect Ratio ◽  
High Aspect Ratio ◽  
Rapid Growth ◽  
Nanotube Films

Ultrasharp and high aspect ratio carbon nanotube atomic force microscopy probes for enhanced surface potential imaging

2008 ◽  
Vol 19 (23) ◽  
pp. 235704 ◽  
Author(s):  
Minhua Zhao ◽  
Vaneet Sharma ◽  
Haoyan Wei ◽  
Robert R Birge ◽  
Jeffrey A Stuart ◽  
...  
Keyword(s):  
Atomic Force Microscopy ◽  
Carbon Nanotube ◽  
Aspect Ratio ◽  
Surface Potential ◽  
High Aspect Ratio ◽  
Force Microscopy ◽  
Atomic Force ◽  
Enhanced Surface

2122 Development of High Aspect Ratio Nanofabrication Method Using Carbon Nanotube Probe

2005 ◽  
Vol 2005.1 (0) ◽  
pp. 553-554
Author(s):  
Norikazu ARIMA ◽  
Akihito MATSUMURO ◽  
Makoto TAKAGI
Keyword(s):  
Carbon Nanotube ◽  
Aspect Ratio ◽  
High Aspect Ratio
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