Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)

2005 ◽

Author(s):

Xuan-Qi Wang ◽

Xing Yang ◽

K. Walsh ◽

Yu-Chong Tai

Keyword(s):

Gas Phase ◽

Silicon Etching ◽

Bromine Trifluoride

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Monitoring desk-jet inks and silicone oils with thickness shear mode resonator

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613598 ◽

2002 ◽

Cited By ~ 2

Author(s):

S. Koller ◽

J.G. Korvink ◽

H. Baltes

Keyword(s):

Shear Mode ◽

Thickness Shear Mode ◽

Silicone Oils ◽

Thickness Shear ◽

Mode Resonator

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Micro tensile-test of silicon film having different crystallographic orientations

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613721 ◽

2002 ◽

Cited By ~ 3

Author(s):

K. Sato ◽

M. Shikida ◽

T. Yoshioka ◽

T. Ando ◽

T. Kawabata

Keyword(s):

Tensile Test ◽

Silicon Film ◽

Crystallographic Orientations

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A precision yaw rate sensor in silicon micromachining

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.635234 ◽

2002 ◽

Cited By ~ 50

Author(s):

M. Lutz ◽

W. Golderer ◽

J. Gerstenmeier ◽

J. Marek ◽

B. Maihofer ◽

...

Keyword(s):

Yaw Rate ◽

Silicon Micromachining ◽

Rate Sensor

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Accurate, cost effective absolute pressure sensor

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.635748 ◽

2002 ◽

Cited By ~ 3

Author(s):

Y. Suzuki ◽

T. Kudo ◽

K. Ikeda

Keyword(s):

Pressure Sensor ◽

Cost Effective ◽

Absolute Pressure

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Micro-optical gate for fiber optic communication

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613651 ◽

2002 ◽

Cited By ~ 5

Author(s):

E. Hashimoto ◽

Y. Uenishi ◽

K. Honma ◽

S. Nagaoka

Keyword(s):

Fiber Optic ◽

Optical Gate ◽

Fiber Optic Communication ◽

Optic Communication

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Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613620 ◽

2002 ◽

Cited By ~ 5

Author(s):

M. Heschel ◽

S. Bouwstra

Keyword(s):

Conformal Coating ◽

Sharp Corners

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Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensors

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613621 ◽

2002 ◽

Cited By ~ 2

Author(s):

P. Maccagnani ◽

R. Angelucci ◽

P. Pozzi ◽

A. Poggi ◽

L. Dori ◽

...

Keyword(s):

High Temperature ◽

Porous Silicon ◽

Thick Film ◽

Gas Sensors ◽

Silicon Layer ◽

Porous Silicon Layer ◽

Insulating Material ◽

Temperature Operating ◽

Oxidized Porous Silicon

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Chemical performance and high temperature characterization of micromachined chemical reactors

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613608 ◽

2002 ◽

Cited By ~ 13

Author(s):

R. Srinivasan ◽

S.L. Firebaugh ◽

I.-M. Hsing ◽

J. Ryley ◽

M.P. Harold ◽

...

Keyword(s):

High Temperature ◽

Chemical Reactors

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Disposable thick-film liposome immunosensor for theophylline using immunochromatographic matrix

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613616 ◽

2002 ◽

Author(s):

Kang Shin Lee ◽

Won-Yong Lee ◽

Je-Kyun Park

Keyword(s):

Thick Film

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Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Gas-phase Silicon Etching With Bromine Trifluoride

Monitoring desk-jet inks and silicone oils with thickness shear mode resonator

Micro tensile-test of silicon film having different crystallographic orientations

A precision yaw rate sensor in silicon micromachining

Accurate, cost effective absolute pressure sensor

Micro-optical gate for fiber optic communication

Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon

Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensors

Chemical performance and high temperature characterization of micromachined chemical reactors

Disposable thick-film liposome immunosensor for theophylline using immunochromatographic matrix

Export Citation Format

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Gas-phase Silicon Etching With Bromine Trifluoride

Monitoring desk-jet inks and silicone oils with thickness shear mode resonator

Micro tensile-test of silicon film having different crystallographic orientations

A precision yaw rate sensor in silicon micromachining

Accurate, cost effective absolute pressure sensor

Micro-optical gate for fiber optic communication

Conformal coating by photoresist of sharp corners of anisotropically etched through-holes in silicon

Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensors

Chemical performance and high temperature characterization of micromachined chemical reactors

Disposable thick-film liposome immunosensor for theophylline using immunochromatographic matrix

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Latest Publications