Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
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377

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0780338294

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Gas-phase Silicon Etching With Bromine Trifluoride

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613740 ◽

2005 ◽

Author(s):

Xuan-Qi Wang ◽

Xing Yang ◽

K. Walsh ◽

Yu-Chong Tai

Keyword(s):

Gas Phase ◽

Silicon Etching ◽

Bromine Trifluoride

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Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.635420 ◽

2002 ◽

Cited By ~ 3

Author(s):

J. Mizuno ◽

K. Nottmeyer ◽

T. Kobayashi ◽

K. Minami ◽

M. Esashi

Keyword(s):

Angular Sensitivity ◽

Silicon Bulk

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An electrostatic micro actuator for a magnetic head tracking system of hard disk drives

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.635385 ◽

2002 ◽

Cited By ~ 18

Author(s):

S. Nakamura ◽

K. Suzuki ◽

M. Ataka ◽

H. Fujita

Keyword(s):

Tracking System ◽

Hard Disk Drives ◽

Hard Disk ◽

Head Tracking ◽

Disk Drives ◽

Magnetic Head ◽

Micro Actuator

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Commercialization of silicon-based gas sensors

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.635266 ◽

2002 ◽

Cited By ~ 2

Author(s):

R.P. Lyle ◽

D. Walters

Keyword(s):

Gas Sensors ◽

Silicon Based

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Designing, realization and characterization of a novel capacitive pressure/flow sensor

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613605 ◽

2002 ◽

Cited By ~ 9

Author(s):

R.E. Oosterbroek ◽

T.S.J. Lammerink ◽

J.W. Berenschot ◽

A. van den Berg ◽

M.C. Elwenspoek

Keyword(s):

Flow Sensor ◽

Pressure Flow

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Bio-optoelectronical "tongue" for detection of pesticide contamination of water

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613695 ◽

2002 ◽

Cited By ~ 4

Author(s):

P. Nikitin ◽

A. Kabashin ◽

T. Ksenevich ◽

N. Kalabina

Keyword(s):

Pesticide Contamination

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Electro-fluidic microsystem modeling based on Kirchhoffian network theory

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.635358 ◽

2002 ◽

Cited By ~ 3

Author(s):

P. Voigt ◽

G. Wachutka

Keyword(s):

Network Theory

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Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensors

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613621 ◽

2002 ◽

Cited By ~ 2

Author(s):

P. Maccagnani ◽

R. Angelucci ◽

P. Pozzi ◽

A. Poggi ◽

L. Dori ◽

...

Keyword(s):

High Temperature ◽

Porous Silicon ◽

Thick Film ◽

Gas Sensors ◽

Silicon Layer ◽

Porous Silicon Layer ◽

Insulating Material ◽

Temperature Operating ◽

Oxidized Porous Silicon

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Chemical performance and high temperature characterization of micromachined chemical reactors

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613608 ◽

2002 ◽

Cited By ~ 13

Author(s):

R. Srinivasan ◽

S.L. Firebaugh ◽

I.-M. Hsing ◽

J. Ryley ◽

M.P. Harold ◽

...

Keyword(s):

High Temperature ◽

Chemical Reactors

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Disposable thick-film liposome immunosensor for theophylline using immunochromatographic matrix

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613616 ◽

2002 ◽

Author(s):

Kang Shin Lee ◽

Won-Yong Lee ◽

Je-Kyun Park

Keyword(s):

Thick Film

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Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)Latest Publications

TOTAL DOCUMENTS

H-INDEX

Published By IEEE

Gas-phase Silicon Etching With Bromine Trifluoride

Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity

An electrostatic micro actuator for a magnetic head tracking system of hard disk drives

Commercialization of silicon-based gas sensors

Designing, realization and characterization of a novel capacitive pressure/flow sensor

Bio-optoelectronical "tongue" for detection of pesticide contamination of water

Electro-fluidic microsystem modeling based on Kirchhoffian network theory

Thick oxidized porous silicon layer as thermo-insulating material for high temperature operating thin and thick film gas sensors

Chemical performance and high temperature characterization of micromachined chemical reactors

Disposable thick-film liposome immunosensor for theophylline using immunochromatographic matrix

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
Latest Publications